Abstract
Functionally graded materials (FGM) were studied and microceramic components were successfully fabricated. The process demonstrates a way to produce ceramic microcomponents with different materials at each side of a layer for tunable properties. Al2O3/Y-ZrO2 FGM has been developed to obtain components that combine properties of both alumina and zirconia. The development of multilayer FGM has been achieved using highly stable Al2O3/Y-ZrO2 suspensions with different compositions. Suspension stability was achieved by controlling the concentration of dispersant with respect to the powder weight. The optimal pH of the suspension was found to be 7 and the amount of dispersant was 8.8 and 13.4 mg/g for alumina and zirconia powders respectively. Problems of crack and cambers have been found, discussed and minimized by controlling the green and sintered conditions. Finally, the electron scanning microscopy (SEM) and back-scattered electrons (BSE) show clearly a nearly net shape microceramic component with a gradient Al2O3/Y-ZrO2 composition.
| Original language | English |
|---|---|
| Pages (from-to) | 1610-1613 |
| Number of pages | 4 |
| Journal | Microelectronic Engineering |
| Volume | 87 |
| Issue number | 5-8 |
| DOIs | |
| State | Published - May 2010 |
| Externally published | Yes |
UN SDGs
This output contributes to the following UN Sustainable Development Goals (SDGs)
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SDG 9 Industry, Innovation, and Infrastructure
Keywords
- FGM
- Microceramic
- Microfabrication
- Soft lithography
ASJC Scopus subject areas
- Electronic, Optical and Magnetic Materials
- Atomic and Molecular Physics, and Optics
- Condensed Matter Physics
- Surfaces, Coatings and Films
- Electrical and Electronic Engineering
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