Abstract
Flexible and semi-transparent high performance thermoelectric energy harvesters are fabricated on low cost bulk mono-crystalline silicon (100) wafers. The released silicon is only 3.6% as thick as bulk silicon reducing the thermal loss significantly and generating nearly 30% more output power than unpeeled harvesters. This generic batch processing is a pragmatic way of transforming traditional silicon circuitry for extremely deformable high-performance integrated electronics.
| Original language | English |
|---|---|
| Pages (from-to) | 3916-3921 |
| Number of pages | 6 |
| Journal | Small |
| Volume | 9 |
| Issue number | 23 |
| DOIs | |
| State | Published - 9 Dec 2013 |
| Externally published | Yes |
Keywords
- bulk silicon (100)
- energy harvester
- mono-crystalline
- semi-transparent
- thermoelectric
ASJC Scopus subject areas
- Biotechnology
- Biomaterials
- General Chemistry
- General Materials Science
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