Flexible and semi-transparent thermoelectric energy harvesters from low cost bulk silicon (100)

Galo Andres Torres Sevilla, Salman Bin Inayat, Jhonathan Prieto Rojas, Aftab Mustansir Hussain, Muhammad Mustafa Hussain*

*Corresponding author for this work

Research output: Contribution to journalArticlepeer-review

71 Scopus citations

Abstract

Flexible and semi-transparent high performance thermoelectric energy harvesters are fabricated on low cost bulk mono-crystalline silicon (100) wafers. The released silicon is only 3.6% as thick as bulk silicon reducing the thermal loss significantly and generating nearly 30% more output power than unpeeled harvesters. This generic batch processing is a pragmatic way of transforming traditional silicon circuitry for extremely deformable high-performance integrated electronics.

Original languageEnglish
Pages (from-to)3916-3921
Number of pages6
JournalSmall
Volume9
Issue number23
DOIs
StatePublished - 9 Dec 2013
Externally publishedYes

Keywords

  • bulk silicon (100)
  • energy harvester
  • mono-crystalline
  • semi-transparent
  • thermoelectric

ASJC Scopus subject areas

  • Biotechnology
  • Biomaterials
  • General Chemistry
  • General Materials Science

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