We report on the fabrication and characterization of superconducting flux qubit coupled to nanomechanical resonator vibration modes. Anisotropic and isotropic etching processes parameters of plasma created by a reactive ion etching of a CF4 gas, were optimized to suspend one arm of the qubit. One of the beams was characterized using a magnetomotive detection scheme in the transmission regime. And suspended beams with different length coupled to a superconducting flux qubits were characterized at base temperature by performing spectroscopy measurements.
Bibliographical noteFunding Information:
Acknowledgements This work was supported by the JSPS through its FIRST Program and MEXT Kakenhi “Quantum Cybernetics.” K.H. gratefully acknowledges the support of the King Fahd University of Petroleum and Minerals, Saudi Arabia, under the FT100009 DSR project.
- Nanomechanical resonator
ASJC Scopus subject areas
- Electronic, Optical and Magnetic Materials
- Condensed Matter Physics