Fabrication and deformation behaviour of multilayer Al2O3/Ti/TiO2 nanotube arrays

S. Baradaran; W. J. Basirun; E. Zalnezhad; M. Hamdi; Ahmed A.D. Sarhan; Y. Alias

doi:10.1016/j.jmbbm.2013.01.020

Fabrication and deformation behaviour of multilayer Al₂O₃/Ti/TiO₂ nanotube arrays

S. Baradaran^*
, W. J. Basirun
, E. Zalnezhad
, M. Hamdi
, Ahmed A.D. Sarhan
, Y. Alias

^*Corresponding author for this work

Research output: Contribution to journal › Article › peer-review

41 Scopus citations

Abstract

In this study, titanium thin films were deposited on alumina substrates by radio frequency (RF) magnetron sputtering. The mechanical properties of the Ti coatings were evaluated in terms of adhesion strength at various RF powers, temperatures, and substrate bias voltages. The coating conditions of 400W of RF power, 250°C, and a 75V substrate bias voltage produced the strongest coating adhesion, as obtained by the Taguchi optimisation method. TiO₂ nanotube arrays were grown as a second layer on the Ti substrates using electrochemical anodisation at a constant potential of 20V and anodisation times of 15min, 45min, and 75min in a NH₄F electrolyte solution (75 ethylene glycol: 25 water). The anodised titanium was annealed at 450°C and 650°C in a N₂ gas furnace to obtain different phases of titania, anatase and rutile, respectively. The mechanical properties of the anodised layer were investigated by nanoindentation. The results indicate that Young's modulus and hardness increased with annealing temperature to 650°C.

Original language	English
Pages (from-to)	272-282
Number of pages	11
Journal	Journal of the Mechanical Behavior of Biomedical Materials
Volume	20
DOIs	https://doi.org/10.1016/j.jmbbm.2013.01.020
State	Published - Apr 2013
Externally published	Yes

Bibliographical note

Funding Information:
The authors wish to thank Pardis Moslemzadeh Tehrani for valuable discussions. This work has been supported by the University of Malaya , grant No: ( HIR F0004-21001 ), FRGS grant number FP039 2010B and RG 181 12SUS .

Keywords

Adhesion
Anodizing
Magnetron sputtering
Nanoindentation
TiO nanotube

ASJC Scopus subject areas

Biomaterials
Biomedical Engineering
Mechanics of Materials

Access to Document

10.1016/j.jmbbm.2013.01.020

Cite this

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title = "Fabrication and deformation behaviour of multilayer Al2O3/Ti/TiO2 nanotube arrays",

abstract = "In this study, titanium thin films were deposited on alumina substrates by radio frequency (RF) magnetron sputtering. The mechanical properties of the Ti coatings were evaluated in terms of adhesion strength at various RF powers, temperatures, and substrate bias voltages. The coating conditions of 400W of RF power, 250°C, and a 75V substrate bias voltage produced the strongest coating adhesion, as obtained by the Taguchi optimisation method. TiO2 nanotube arrays were grown as a second layer on the Ti substrates using electrochemical anodisation at a constant potential of 20V and anodisation times of 15min, 45min, and 75min in a NH4F electrolyte solution (75 ethylene glycol: 25 water). The anodised titanium was annealed at 450°C and 650°C in a N2 gas furnace to obtain different phases of titania, anatase and rutile, respectively. The mechanical properties of the anodised layer were investigated by nanoindentation. The results indicate that Young's modulus and hardness increased with annealing temperature to 650°C.",

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author = "S. Baradaran and Basirun, \{W. J.\} and E. Zalnezhad and M. Hamdi and Sarhan, \{Ahmed A.D.\} and Y. Alias",

note = "Funding Information: The authors wish to thank Pardis Moslemzadeh Tehrani for valuable discussions. This work has been supported by the University of Malaya , grant No: ( HIR F0004-21001 ), FRGS grant number FP039 2010B and RG 181 12SUS .",

year = "2013",

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doi = "10.1016/j.jmbbm.2013.01.020",

language = "English",

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journal = "Journal of the Mechanical Behavior of Biomedical Materials",

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AU - Baradaran, S.

AU - Basirun, W. J.

AU - Zalnezhad, E.

AU - Hamdi, M.

AU - Sarhan, Ahmed A.D.

AU - Alias, Y.

N1 - Funding Information: The authors wish to thank Pardis Moslemzadeh Tehrani for valuable discussions. This work has been supported by the University of Malaya , grant No: ( HIR F0004-21001 ), FRGS grant number FP039 2010B and RG 181 12SUS .

PY - 2013/4

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N2 - In this study, titanium thin films were deposited on alumina substrates by radio frequency (RF) magnetron sputtering. The mechanical properties of the Ti coatings were evaluated in terms of adhesion strength at various RF powers, temperatures, and substrate bias voltages. The coating conditions of 400W of RF power, 250°C, and a 75V substrate bias voltage produced the strongest coating adhesion, as obtained by the Taguchi optimisation method. TiO2 nanotube arrays were grown as a second layer on the Ti substrates using electrochemical anodisation at a constant potential of 20V and anodisation times of 15min, 45min, and 75min in a NH4F electrolyte solution (75 ethylene glycol: 25 water). The anodised titanium was annealed at 450°C and 650°C in a N2 gas furnace to obtain different phases of titania, anatase and rutile, respectively. The mechanical properties of the anodised layer were investigated by nanoindentation. The results indicate that Young's modulus and hardness increased with annealing temperature to 650°C.

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