Emerging Nanotechnology for Integration of Nanostructures in Nanoelectronic Devices

T. Baron; C. Agraffeil; F. Dhalluin; M. Kogelschtaz; G. Cunge; T. Chevolleau; B. Salem; B. Salhi; H. Abed; A. Potié; L. Latu-Romain; C. Ternon; K. Aissou; L. Montés; P. Mur; G. Molas; B. De Salvo; E. Jalaguier; T. Ernst; P. Ferret; P. Gentile; N. Pauc

doi:10.1002/9780470649343.ch14

Emerging Nanotechnology for Integration of Nanostructures in Nanoelectronic Devices

T. Baron^*, C. Agraffeil, F. Dhalluin, M. Kogelschtaz, G. Cunge, T. Chevolleau, B. Salem, B. Salhi, H. Abed, A. Potié, L. Latu-Romain, C. Ternon, K. Aissou, L. Montés, P. Mur, G. Molas, B. De Salvo, E. Jalaguier, T. Ernst, P. FerretP. Gentile, N. Pauc

^*Corresponding author for this work

Research output: Chapter in Book/Report/Conference proceeding › Chapter › peer-review

Original language	English
Title of host publication	Future Trends in Microelectronics
Subtitle of host publication	From Nanophotonics to Sensors and Energy
Publisher	John Wiley and Sons
Pages	183-190
Number of pages	8
ISBN (Print)	9780470551370
DOIs	https://doi.org/10.1002/9780470649343.ch14
State	Published - 18 Aug 2010
Externally published	Yes

Keywords

Chemical vapor deposition
Diblock copolymers
Nanoelectronic devices
Nanomaterials
Nanotechnology

ASJC Scopus subject areas

General Engineering

Access to Document

10.1002/9780470649343.ch14

Cite this

Baron, T., Agraffeil, C., Dhalluin, F., Kogelschtaz, M., Cunge, G., Chevolleau, T., Salem, B., Salhi, B., Abed, H., Potié, A., Latu-Romain, L., Ternon, C., Aissou, K., Montés, L., Mur, P., Molas, G., De Salvo, B., Jalaguier, E., Ernst, T., ... Pauc, N. (2010). Emerging Nanotechnology for Integration of Nanostructures in Nanoelectronic Devices. In Future Trends in Microelectronics: From Nanophotonics to Sensors and Energy (pp. 183-190). John Wiley and Sons. https://doi.org/10.1002/9780470649343.ch14

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author = "T. Baron and C. Agraffeil and F. Dhalluin and M. Kogelschtaz and G. Cunge and T. Chevolleau and B. Salem and B. Salhi and H. Abed and A. Poti{\'e} and L. Latu-Romain and C. Ternon and K. Aissou and L. Mont{\'e}s and P. Mur and G. Molas and {De Salvo}, B. and E. Jalaguier and T. Ernst and P. Ferret and P. Gentile and N. Pauc",

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Baron, T, Agraffeil, C, Dhalluin, F, Kogelschtaz, M, Cunge, G, Chevolleau, T, Salem, B, Salhi, B, Abed, H, Potié, A, Latu-Romain, L, Ternon, C, Aissou, K, Montés, L, Mur, P, Molas, G, De Salvo, B, Jalaguier, E, Ernst, T, Ferret, P, Gentile, P & Pauc, N 2010, Emerging Nanotechnology for Integration of Nanostructures in Nanoelectronic Devices. in Future Trends in Microelectronics: From Nanophotonics to Sensors and Energy. John Wiley and Sons, pp. 183-190. https://doi.org/10.1002/9780470649343.ch14

TY - CHAP

T1 - Emerging Nanotechnology for Integration of Nanostructures in Nanoelectronic Devices

AU - Baron, T.

AU - Agraffeil, C.

AU - Dhalluin, F.

AU - Kogelschtaz, M.

AU - Cunge, G.

AU - Chevolleau, T.

AU - Salem, B.

AU - Salhi, B.

AU - Abed, H.

AU - Potié, A.

AU - Latu-Romain, L.

AU - Ternon, C.

AU - Aissou, K.

AU - Montés, L.

AU - Mur, P.

AU - Molas, G.

AU - De Salvo, B.

AU - Jalaguier, E.

AU - Ernst, T.

AU - Ferret, P.

AU - Gentile, P.

AU - Pauc, N.

PY - 2010/8/18

Y1 - 2010/8/18

KW - Chemical vapor deposition

KW - Diblock copolymers

KW - Nanoelectronic devices

KW - Nanomaterials

KW - Nanotechnology

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U2 - 10.1002/9780470649343.ch14

DO - 10.1002/9780470649343.ch14

M3 - Chapter

AN - SCOPUS:84885564552

SN - 9780470551370

SP - 183

EP - 190

BT - Future Trends in Microelectronics

PB - John Wiley and Sons

ER -