TY - GEN
T1 - Effects of release hole size on microscale phononic crystals
AU - Soliman, Y. M.
AU - Goettler, D. F.
AU - Leseman, Z. C.
AU - El-Kady, I.
AU - Olsson, R. H.
PY - 2009
Y1 - 2009
N2 - We have experimentally investigated the effects of release hole size on acoustic transmission through micro-machined phononic band gap crystals. The results confirm previous theoretical studies and determine the range of release hole sizes for which the band gap is minimally compromised. The experiments were performed on micro fabricated 2D phononic crystal plates comprised of high acoustic impedance tungsten rods arranged in a square lattice inside a low acoustic impedance silicon dioxide host medium. The lattice constant and diameter of the W rods in this experiment were 45 μm and 28.8 μm corresponding to a phononic band-gap centered at 67 MHz. Phononic crystals were characterized with 15, 12.5, 10, and 7.5 μm diameter release holes, required to undercut the crystal and suspend it from the substrate, placed in the center of the W rods. As the air hole diameter decreases, the band gap frequency width increases. However, as the diameter of the release holes approach 5 μm, the fabrication yield significantly decreases. From these experiments an optimum release hole diameter of 7.5 μm was found that maximizes phononic band gap performance and manufacturability.
AB - We have experimentally investigated the effects of release hole size on acoustic transmission through micro-machined phononic band gap crystals. The results confirm previous theoretical studies and determine the range of release hole sizes for which the band gap is minimally compromised. The experiments were performed on micro fabricated 2D phononic crystal plates comprised of high acoustic impedance tungsten rods arranged in a square lattice inside a low acoustic impedance silicon dioxide host medium. The lattice constant and diameter of the W rods in this experiment were 45 μm and 28.8 μm corresponding to a phononic band-gap centered at 67 MHz. Phononic crystals were characterized with 15, 12.5, 10, and 7.5 μm diameter release holes, required to undercut the crystal and suspend it from the substrate, placed in the center of the W rods. As the air hole diameter decreases, the band gap frequency width increases. However, as the diameter of the release holes approach 5 μm, the fabrication yield significantly decreases. From these experiments an optimum release hole diameter of 7.5 μm was found that maximizes phononic band gap performance and manufacturability.
UR - https://www.scopus.com/pages/publications/72849127570
M3 - Conference contribution
AN - SCOPUS:72849127570
SN - 9781615671892
SN - 9781615671892
T3 - Society for Experimental Mechanics - SEM Annual Conference and Exposition on Experimental and Applied Mechanics 2009
SP - 2562
EP - 2570
BT - Society for Experimental Mechanics - SEM Annual Conference and Exposition on Experimental and Applied Mechanics 2009
T2 - SEM Annual Conference and Exposition on Experimental and Applied Mechanics 2009
Y2 - 1 June 2009 through 4 June 2009
ER -