TY - GEN
T1 - Effect of release holes on micro-scale solid-solid phononic crystals
AU - Su, Mehmet
AU - Reinke, Charles
AU - Soliman, Yasser
AU - Leseman, Zayd
AU - Olsson, Roy
AU - El-Kady, Ihab
PY - 2010
Y1 - 2010
N2 - Solid-solid phononic crystals (solid inclusions in a solid matrix) exhibit wider bandgaps than those observed with airsolid phononic crystals (air inclusions in a solid matrix). In a solid-solid phononic crystal operating in the low MHz range, it is essential to place release holes in the center of the inclusions to release devices from the substrate. It is necessary to release, and therefore suspend the phononic crystal to avoid propagation losses through the substrate. In this report we investigate the effect of release holes on phononic bandgaps and highlight the need for careful design to avoid compromising the phononic bandgap. Studying release issues for solid-solid phononic crystals is essential for the successful fabrication of such devices.
AB - Solid-solid phononic crystals (solid inclusions in a solid matrix) exhibit wider bandgaps than those observed with airsolid phononic crystals (air inclusions in a solid matrix). In a solid-solid phononic crystal operating in the low MHz range, it is essential to place release holes in the center of the inclusions to release devices from the substrate. It is necessary to release, and therefore suspend the phononic crystal to avoid propagation losses through the substrate. In this report we investigate the effect of release holes on phononic bandgaps and highlight the need for careful design to avoid compromising the phononic bandgap. Studying release issues for solid-solid phononic crystals is essential for the successful fabrication of such devices.
UR - https://www.scopus.com/pages/publications/84881406175
U2 - 10.1115/IMECE2010-39403
DO - 10.1115/IMECE2010-39403
M3 - Conference contribution
AN - SCOPUS:84881406175
SN - 9780791844502
T3 - ASME International Mechanical Engineering Congress and Exposition, Proceedings (IMECE)
SP - 395
EP - 399
BT - Sound, Vibration and Design
PB - American Society of Mechanical Engineers (ASME)
T2 - ASME 2010 International Mechanical Engineering Congress and Exposition, IMECE 2010
Y2 - 12 November 2010 through 18 November 2010
ER -