Effect of Bias Voltage and Cr/Al Content on the Mechanical and Scratch Resistance Properties of CrAlN Coatings Deposited by DC Magnetron Sputtering

Chromium–aluminum nitride (CrAlN) coatings were deposited on polished H13 tool steel substrates using direct current (DC) magnetron sputtering. The Cr/Al composition in the target was varied by inserting either four or eight chromium (Cr) plugs into cavities machined into an aluminum (Al) plate target. Nitrogen was introduced as a reactive gas to facilitate the formation of the nitride phase. Coatings were deposited at substrate bias voltages of −30 V, −50 V, and −60 V to study the combined effects of composition and ion energy on coating properties. Compositional analysis of coatings deposited at a −50 V bias revealed Cr/Al ratios of approximately 0.8 and 1.7 for the 4- and 8-plug configurations, respectively. This increase in the Cr/Al ratio led to a 2.6-fold improvement in coating hardness. Coatings produced using the eight-Cr-plug target exhibited a nearly linear increase in hardness with increasing substrate bias voltage. Cross-sectional scanning electron microscopy revealed a uniform bilayer structure consisting of an approximately 0.5 µm metal interlayer beneath a 2–3 µm CrAlN coating. Surface morphology analysis indicated the presence of coarse microdroplets in coatings with the lower Cr/Al ratio. These microdroplets were significantly suppressed in coatings with higher Cr/Al content, especially at increased bias voltages. This suppression is likely due to enhanced ion bombardment associated with the increased Cr content, attributed to Cr’s relatively higher atomic mass compared to Al. Coatings with lower hardness exhibited greater scratch resistance, likely due to the influence of residual compressive stresses. The findings highlight the critical role of both Cr/Al content and substrate bias in tailoring the tribo-mechanical performance of PVD CrAlN coatings for wear-resistant applications.