Dynamic switching of MEMS shunt switches

Mahmoud E. Khater*, Krishna Vummidi, Eihab M. Abdel-Rahman, Ali H. Nayfeh, Sanjay Raman

*Corresponding author for this work

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

Abstract

We investigate dynamic switching modes of capacitive MEMS shunt switches using a biased AC signal. We show that the voltage requirements for dynamic switching are significantly less than those for static switching. We found out that significant reductions in actuation voltage can be obtained. However, the switching time is longer than that realized using static switching. We also examine various actuation schemes to further reduce the actuation voltage. As a result, we obtain 60% reduction in the actuation voltage.

Original languageEnglish
Title of host publicationASME 2010 International Design Engineering Technical Conferences and Computers and Information in Engineering Conference, IDETC/CIE2010
Pages561-569
Number of pages9
DOIs
StatePublished - 2010
Externally publishedYes

Publication series

NameProceedings of the ASME Design Engineering Technical Conference
Volume4

Keywords

  • Dynamics switching
  • RF switch
  • Voltage requirements

ASJC Scopus subject areas

  • Modeling and Simulation
  • Mechanical Engineering
  • Computer Science Applications
  • Computer Graphics and Computer-Aided Design

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