Dynamic Pull-in of Shunt Capacitive MEMS Switches

Krishna Vummidi; M. Khater; E. Abdel-Rahman; A. Nayfeh; S. Raman

doi:10.1016/j.proche.2009.07.155

Dynamic Pull-in of Shunt Capacitive MEMS Switches

Krishna Vummidi^*, M. Khater, E. Abdel-Rahman, A. Nayfeh, S. Raman

^*Corresponding author for this work

Research output: Contribution to journal › Conference article › peer-review

18 Scopus citations

Abstract

We report experimental results for a capacitive MEMS shunt switch that employs Dynamic Pull-in (V_DP = V_DC + RMS v_ac) as an actuation method. We show that VDP is significantly less than the static pull-in voltage (V_SP = V_DC) traditionally used for actuation. We also show that the reduction in actuation voltage can be enhanced be operating at the nonlinear resonance frequency.

Original language	English
Pages (from-to)	622-625
Number of pages	4
Journal	Procedia Chemistry
Volume	1
Issue number	1
DOIs	https://doi.org/10.1016/j.proche.2009.07.155
State	Published - Sep 2009
Externally published	Yes

Bibliographical note

Funding Information:
The authors would like to acknowledge Dr. Dev Palmer, Program Manager, Army Research Office for partially funding (W911NF-06-1-0422) this project. The authors would also like to acknowledge Mr. Riku Sudo’s valuable contributions to micro-motion measurements.

Keywords

Dynamic Actuation
MEMS
Reduced-order models
Shunt switches

ASJC Scopus subject areas

General Chemistry
General Chemical Engineering

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10.1016/j.proche.2009.07.155

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title = "Dynamic Pull-in of Shunt Capacitive MEMS Switches",

abstract = "We report experimental results for a capacitive MEMS shunt switch that employs Dynamic Pull-in (VDP = VDC + RMS vac) as an actuation method. We show that VDP is significantly less than the static pull-in voltage (VSP = VDC) traditionally used for actuation. We also show that the reduction in actuation voltage can be enhanced be operating at the nonlinear resonance frequency.",

keywords = "Dynamic Actuation, MEMS, Reduced-order models, Shunt switches",

author = "Krishna Vummidi and M. Khater and E. Abdel-Rahman and A. Nayfeh and S. Raman",

note = "Funding Information: The authors would like to acknowledge Dr. Dev Palmer, Program Manager, Army Research Office for partially funding (W911NF-06-1-0422) this project. The authors would also like to acknowledge Mr. Riku Sudo{\textquoteright}s valuable contributions to micro-motion measurements.",

year = "2009",

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doi = "10.1016/j.proche.2009.07.155",

language = "English",

volume = "1",

pages = "622--625",

journal = "Procedia Chemistry",

issn = "1876-6196",

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TY - JOUR

T1 - Dynamic Pull-in of Shunt Capacitive MEMS Switches

AU - Vummidi, Krishna

AU - Khater, M.

AU - Abdel-Rahman, E.

AU - Nayfeh, A.

AU - Raman, S.

N1 - Funding Information: The authors would like to acknowledge Dr. Dev Palmer, Program Manager, Army Research Office for partially funding (W911NF-06-1-0422) this project. The authors would also like to acknowledge Mr. Riku Sudo’s valuable contributions to micro-motion measurements.

PY - 2009/9

Y1 - 2009/9

N2 - We report experimental results for a capacitive MEMS shunt switch that employs Dynamic Pull-in (VDP = VDC + RMS vac) as an actuation method. We show that VDP is significantly less than the static pull-in voltage (VSP = VDC) traditionally used for actuation. We also show that the reduction in actuation voltage can be enhanced be operating at the nonlinear resonance frequency.

AB - We report experimental results for a capacitive MEMS shunt switch that employs Dynamic Pull-in (VDP = VDC + RMS vac) as an actuation method. We show that VDP is significantly less than the static pull-in voltage (VSP = VDC) traditionally used for actuation. We also show that the reduction in actuation voltage can be enhanced be operating at the nonlinear resonance frequency.

KW - Dynamic Actuation

KW - MEMS

KW - Reduced-order models

KW - Shunt switches

UR - https://www.scopus.com/pages/publications/71549162856

U2 - 10.1016/j.proche.2009.07.155

DO - 10.1016/j.proche.2009.07.155

M3 - Conference article

AN - SCOPUS:71549162856

SN - 1876-6196

VL - 1

SP - 622

EP - 625

JO - Procedia Chemistry

JF - Procedia Chemistry

IS - 1

ER -

Dynamic Pull-in of Shunt Capacitive MEMS Switches

Abstract

Bibliographical note

Keywords

ASJC Scopus subject areas

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