Abstract
This paper presents the theoretical dynamics modeling and design of an electrostatic differential-capacitance sensor measuring noncontact harmonic forces and torques. The sensor combines both electrostatic sensor and actuator. The dynamic nonlinear differential equations of the sensor system, stability, its linearization, and behavior at resonance are discussed together with the design parameters affecting sensitivity and thermal noise effects.
| Original language | English |
|---|---|
| Pages (from-to) | 23119-23132 |
| Number of pages | 14 |
| Journal | International Journal of Applied Engineering Research |
| Volume | 9 |
| Issue number | 23 |
| State | Published - 2014 |
Bibliographical note
Publisher Copyright:© Research India Publications.
Keywords
- Accelerometer
- Capacitive actuator
- Differential capacitive sensor
- Gravity gradiometer
- Noncontact forces and torques measurements
ASJC Scopus subject areas
- General Engineering
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