Determination of optical constants in the EUV/soft X-ray region using the Luus-Jaakola optimization procedure

S. M. Al-Marzoug; R. J.W. Hodgson

doi:10.1016/j.optcom.2007.08.001

Determination of optical constants in the EUV/soft X-ray region using the Luus-Jaakola optimization procedure

S. M. Al-Marzoug
, R. J.W. Hodgson^*

^*Corresponding author for this work

Research output: Contribution to journal › Article › peer-review

2 Scopus citations

Abstract

A Luus-Jaakola optimization procedure is described that simultaneously determines the optical constants, thickness and root mean square roughness of thin films for reflectance versus angle-of-incidences data measured in the EUV/soft X-ray region. The optimization method is applied to different films at different wavelengths. The results show that the Luus-Jaakola optimization procedure is able to determine the thickness of films and the roughness with an accuracy of less than 7%. The optical constants obtained are also in good agreement with reported values for films having an error of less than 1%.

Original language	English
Pages (from-to)	110-113
Number of pages	4
Journal	Optics Communications
Volume	280
Issue number	1
DOIs	https://doi.org/10.1016/j.optcom.2007.08.001
State	Published - 1 Dec 2007
Externally published	Yes

Bibliographical note

Funding Information:
The authors would like to acknowledge the financial support from the Government of Saudi Arabia for this study.

Keywords

Index of refraction
Luus-Jaakola optimization
Optical constants
Reflectivity

ASJC Scopus subject areas

Electronic, Optical and Magnetic Materials
Atomic and Molecular Physics, and Optics
Physical and Theoretical Chemistry
Electrical and Electronic Engineering

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10.1016/j.optcom.2007.08.001

Cite this

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title = "Determination of optical constants in the EUV/soft X-ray region using the Luus-Jaakola optimization procedure",

abstract = "A Luus-Jaakola optimization procedure is described that simultaneously determines the optical constants, thickness and root mean square roughness of thin films for reflectance versus angle-of-incidences data measured in the EUV/soft X-ray region. The optimization method is applied to different films at different wavelengths. The results show that the Luus-Jaakola optimization procedure is able to determine the thickness of films and the roughness with an accuracy of less than 7\%. The optical constants obtained are also in good agreement with reported values for films having an error of less than 1\%.",

keywords = "Index of refraction, Luus-Jaakola optimization, Optical constants, Reflectivity",

author = "Al-Marzoug, \{S. M.\} and Hodgson, \{R. J.W.\}",

note = "Funding Information: The authors would like to acknowledge the financial support from the Government of Saudi Arabia for this study.",

year = "2007",

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doi = "10.1016/j.optcom.2007.08.001",

language = "English",

volume = "280",

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journal = "Optics Communications",

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T1 - Determination of optical constants in the EUV/soft X-ray region using the Luus-Jaakola optimization procedure

AU - Al-Marzoug, S. M.

AU - Hodgson, R. J.W.

N1 - Funding Information: The authors would like to acknowledge the financial support from the Government of Saudi Arabia for this study.

PY - 2007/12/1

Y1 - 2007/12/1

N2 - A Luus-Jaakola optimization procedure is described that simultaneously determines the optical constants, thickness and root mean square roughness of thin films for reflectance versus angle-of-incidences data measured in the EUV/soft X-ray region. The optimization method is applied to different films at different wavelengths. The results show that the Luus-Jaakola optimization procedure is able to determine the thickness of films and the roughness with an accuracy of less than 7%. The optical constants obtained are also in good agreement with reported values for films having an error of less than 1%.

AB - A Luus-Jaakola optimization procedure is described that simultaneously determines the optical constants, thickness and root mean square roughness of thin films for reflectance versus angle-of-incidences data measured in the EUV/soft X-ray region. The optimization method is applied to different films at different wavelengths. The results show that the Luus-Jaakola optimization procedure is able to determine the thickness of films and the roughness with an accuracy of less than 7%. The optical constants obtained are also in good agreement with reported values for films having an error of less than 1%.

KW - Index of refraction

KW - Luus-Jaakola optimization

KW - Optical constants

KW - Reflectivity

UR - https://www.scopus.com/pages/publications/35148889136

U2 - 10.1016/j.optcom.2007.08.001

DO - 10.1016/j.optcom.2007.08.001

M3 - Article

AN - SCOPUS:35148889136

SN - 0030-4018

VL - 280

SP - 110

EP - 113

JO - Optics Communications

JF - Optics Communications

IS - 1

ER -

Determination of optical constants in the EUV/soft X-ray region using the Luus-Jaakola optimization procedure

Abstract

Bibliographical note

Keywords

ASJC Scopus subject areas

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