Abstract
This paper presents a new detection method of cyclic-fold bifurcations in electrostatic MEMS transducers based on a variant of the harmonic detection of resonance method. The electrostatic transducer is driven by an unbiased harmonic signal at half its natural frequency, ω a = 1/2 ω o. The response of the transducer consists of static displacement and a series of harmonics at 2 ω a, 4 ω a, and so on. Its motion-induced current is shifted by the excitation frequency, ω a, to appear at 3 ω a, 5 ω a, and higher odd harmonics, providing higher sensitivity to the measurement of harmonic motions. With this method, we successfully detected the variation in the location of the cyclic-fold bifurcation of an encapsulated electrostatic MEMS transducer. We also detected a regime of tapping mode motions subsequent to the bifurcation.
| Original language | English |
|---|---|
| Article number | 085007 |
| Journal | Journal of Micromechanics and Microengineering |
| Volume | 27 |
| Issue number | 8 |
| DOIs | |
| State | Published - 20 Jul 2017 |
Bibliographical note
Publisher Copyright:© 2017 IOP Publishing Ltd.
Keywords
- bifurcation-based sensing
- cyclic-fold bifurcation
- dynamic pull-in
- encapsulated MEMS
- harmonic detection of resonance (HDR)
- motion-induced current
ASJC Scopus subject areas
- Electronic, Optical and Magnetic Materials
- Mechanics of Materials
- Mechanical Engineering
- Electrical and Electronic Engineering