Design and Modeling of Robust Multi Degree of Freedom Micro Gyroscope with Wide Bandwidth

Micro gyroscopes are among the rapidly aggrandizing field of the micro electro mechanical systems (MEMS), which is procured with its extensive range of applications around the globe. This paper depicts an innovated approach of designing and modeling of a novel brawny multi-mass gyroscope to acquire dynamic motion amplification and spacious bandwidth. The proposed resonator block is accompanied by a series of proof masses coupled to each other where the primary mass defines the driving unit, secondary mass passes on the dynamic energy, tertiary mass is oscillating mass. The main crux of this design is that increasing the number of masses ameliorates the model with respect to amplification by manifolds and enhances the bandwidth. To analyze this structural model, assistance of finite element method (FEM) based analysis is pursued and simulations are carried out for the examination of distinct frequency modes and frequency response of this robust system. The wide bandwidth of over 3 kHz is achieved by this proposed dynamic model.