Abstract
Undoped thin films of tin oxide and those doped with indium oxide and nickel oxides were deposited by electron beam evaporation. The effects of the film thickness and preparation conditions (films prepared with or without the presence of oxygen environment during deposition) on the optical and carbon monoxide sensing properties of the films were studied. The films were characterized using X-ray diffraction and X-ray photoelectron spectroscopy and optical spectroscopy techniques. All the films were found to be amorphous. It was found that the sensitivity of the films to CO increased with the thickness and the porosity of the films. It was found that their selectivity to CO gas relative to CO2 and SO2 gases could be improved upon doping the films with indium (or nickel) oxide.
| Original language | English |
|---|---|
| Pages (from-to) | 1162-1167 |
| Number of pages | 6 |
| Journal | Talanta |
| Volume | 65 |
| Issue number | 5 |
| DOIs | |
| State | Published - 15 Mar 2005 |
Bibliographical note
Funding Information:The support provided by the Research Institute and the Physics Department of King Fahd University of Petroleum and Minerals is acknowledged. This work is part of project #FT-2001/8. The assistance of Mr. S. Jaroudi with the XRD measurements and Dr. N. Tabet with the XPS measurements is also acknowledged.
Keywords
- CO sensor
- Semiconductor sensor
- SnO
- Thin film
ASJC Scopus subject areas
- Analytical Chemistry