CMOS-compatible purely capacitive interfaces for high-density in-vivo recording from neural tissue

Sven Schroder; Claudia Cecchetto; Stefan Keil; Mufti Mahmud; Evelin Brose; Ozgu Dogan; Gabriel Bertotti; Dirk Wolanski; Bernd Tillack; Jessica Schneidewind; Hassan Gargouri; Michael Arens; Jurgen Bruns; Bernd Szyszka; Stefano Vassanelli; Roland Thewes

doi:10.1109/BioCAS.2015.7348358

CMOS-compatible purely capacitive interfaces for high-density in-vivo recording from neural tissue

Sven Schroder, Claudia Cecchetto, Stefan Keil, Mufti Mahmud, Evelin Brose, Ozgu Dogan, Gabriel Bertotti, Dirk Wolanski, Bernd Tillack, Jessica Schneidewind, Hassan Gargouri, Michael Arens, Jurgen Bruns, Bernd Szyszka, Stefano Vassanelli, Roland Thewes

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

19 Scopus citations

Abstract

CMOS-based neural tissue in-vivo recording chips with a purely capacitive interface are presented with 256 sites resp. 256 recording channels. A 3D post-CMOS ALD-based process allows to provide a highly efficient sensor dielectric and to realize a protective insulation layer for the non-Active part of the fabricated devices. A simple interconnect-efficient sensor array topology is used. Electrical characterizations and in-vivo measurements with biological content reveal proper operation of the presented approach.

Original language	English
Title of host publication	IEEE Biomedical Circuits and Systems Conference
Subtitle of host publication	Engineering for Healthy Minds and Able Bodies, BioCAS 2015 - Proceedings
Publisher	Institute of Electrical and Electronics Engineers Inc.
ISBN (Electronic)	9781479972333
DOIs	https://doi.org/10.1109/BioCAS.2015.7348358
State	Published - 4 Dec 2015
Externally published	Yes
Event	11th IEEE Biomedical Circuits and Systems Conference, BioCAS 2015 - Atlanta, United States Duration: 22 Oct 2015 → 24 Oct 2015

Publication series

Name	IEEE Biomedical Circuits and Systems Conference: Engineering for Healthy Minds and Able Bodies, BioCAS 2015 - Proceedings

Conference

Conference	11th IEEE Biomedical Circuits and Systems Conference, BioCAS 2015
Country/Territory	United States
City	Atlanta
Period	22/10/15 → 24/10/15

Bibliographical note

Publisher Copyright:
© 2015 IEEE.

Keywords

CMOS
atomic layer deposition
capacitive interface
dielectric
in-vivo
neural tissue recording

ASJC Scopus subject areas

Biotechnology
Instrumentation
Biomedical Engineering
Electrical and Electronic Engineering

Access to Document

10.1109/BioCAS.2015.7348358

Cite this

Schroder, S., Cecchetto, C., Keil, S., Mahmud, M., Brose, E., Dogan, O., Bertotti, G., Wolanski, D., Tillack, B., Schneidewind, J., Gargouri, H., Arens, M., Bruns, J., Szyszka, B., Vassanelli, S., & Thewes, R. (2015). CMOS-compatible purely capacitive interfaces for high-density in-vivo recording from neural tissue. In IEEE Biomedical Circuits and Systems Conference: Engineering for Healthy Minds and Able Bodies, BioCAS 2015 - Proceedings Article 7348358 (IEEE Biomedical Circuits and Systems Conference: Engineering for Healthy Minds and Able Bodies, BioCAS 2015 - Proceedings). Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/BioCAS.2015.7348358

Schroder, Sven ; Cecchetto, Claudia ; Keil, Stefan et al. / CMOS-compatible purely capacitive interfaces for high-density in-vivo recording from neural tissue. IEEE Biomedical Circuits and Systems Conference: Engineering for Healthy Minds and Able Bodies, BioCAS 2015 - Proceedings. Institute of Electrical and Electronics Engineers Inc., 2015. (IEEE Biomedical Circuits and Systems Conference: Engineering for Healthy Minds and Able Bodies, BioCAS 2015 - Proceedings).

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title = "CMOS-compatible purely capacitive interfaces for high-density in-vivo recording from neural tissue",

abstract = "CMOS-based neural tissue in-vivo recording chips with a purely capacitive interface are presented with 256 sites resp. 256 recording channels. A 3D post-CMOS ALD-based process allows to provide a highly efficient sensor dielectric and to realize a protective insulation layer for the non-Active part of the fabricated devices. A simple interconnect-efficient sensor array topology is used. Electrical characterizations and in-vivo measurements with biological content reveal proper operation of the presented approach.",

keywords = "CMOS, atomic layer deposition, capacitive interface, dielectric, in-vivo, neural tissue recording",

author = "Sven Schroder and Claudia Cecchetto and Stefan Keil and Mufti Mahmud and Evelin Brose and Ozgu Dogan and Gabriel Bertotti and Dirk Wolanski and Bernd Tillack and Jessica Schneidewind and Hassan Gargouri and Michael Arens and Jurgen Bruns and Bernd Szyszka and Stefano Vassanelli and Roland Thewes",

note = "Publisher Copyright: {\textcopyright} 2015 IEEE.; 11th IEEE Biomedical Circuits and Systems Conference, BioCAS 2015 ; Conference date: 22-10-2015 Through 24-10-2015",

year = "2015",

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doi = "10.1109/BioCAS.2015.7348358",

language = "English",

series = "IEEE Biomedical Circuits and Systems Conference: Engineering for Healthy Minds and Able Bodies, BioCAS 2015 - Proceedings",

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Schroder, S, Cecchetto, C, Keil, S, Mahmud, M, Brose, E, Dogan, O, Bertotti, G, Wolanski, D, Tillack, B, Schneidewind, J, Gargouri, H, Arens, M, Bruns, J, Szyszka, B, Vassanelli, S & Thewes, R 2015, CMOS-compatible purely capacitive interfaces for high-density in-vivo recording from neural tissue. in IEEE Biomedical Circuits and Systems Conference: Engineering for Healthy Minds and Able Bodies, BioCAS 2015 - Proceedings., 7348358, IEEE Biomedical Circuits and Systems Conference: Engineering for Healthy Minds and Able Bodies, BioCAS 2015 - Proceedings, Institute of Electrical and Electronics Engineers Inc., 11th IEEE Biomedical Circuits and Systems Conference, BioCAS 2015, Atlanta, United States, 22/10/15. https://doi.org/10.1109/BioCAS.2015.7348358

CMOS-compatible purely capacitive interfaces for high-density in-vivo recording from neural tissue. / Schroder, Sven; Cecchetto, Claudia; Keil, Stefan et al.
IEEE Biomedical Circuits and Systems Conference: Engineering for Healthy Minds and Able Bodies, BioCAS 2015 - Proceedings. Institute of Electrical and Electronics Engineers Inc., 2015. 7348358 (IEEE Biomedical Circuits and Systems Conference: Engineering for Healthy Minds and Able Bodies, BioCAS 2015 - Proceedings).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

TY - GEN

T1 - CMOS-compatible purely capacitive interfaces for high-density in-vivo recording from neural tissue

AU - Schroder, Sven

AU - Cecchetto, Claudia

AU - Keil, Stefan

AU - Mahmud, Mufti

AU - Brose, Evelin

AU - Dogan, Ozgu

AU - Bertotti, Gabriel

AU - Wolanski, Dirk

AU - Tillack, Bernd

AU - Schneidewind, Jessica

AU - Gargouri, Hassan

AU - Arens, Michael

AU - Bruns, Jurgen

AU - Szyszka, Bernd

AU - Vassanelli, Stefano

AU - Thewes, Roland

PY - 2015/12/4

Y1 - 2015/12/4

N2 - CMOS-based neural tissue in-vivo recording chips with a purely capacitive interface are presented with 256 sites resp. 256 recording channels. A 3D post-CMOS ALD-based process allows to provide a highly efficient sensor dielectric and to realize a protective insulation layer for the non-Active part of the fabricated devices. A simple interconnect-efficient sensor array topology is used. Electrical characterizations and in-vivo measurements with biological content reveal proper operation of the presented approach.

AB - CMOS-based neural tissue in-vivo recording chips with a purely capacitive interface are presented with 256 sites resp. 256 recording channels. A 3D post-CMOS ALD-based process allows to provide a highly efficient sensor dielectric and to realize a protective insulation layer for the non-Active part of the fabricated devices. A simple interconnect-efficient sensor array topology is used. Electrical characterizations and in-vivo measurements with biological content reveal proper operation of the presented approach.

KW - CMOS

KW - atomic layer deposition

KW - capacitive interface

KW - dielectric

KW - in-vivo

KW - neural tissue recording

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AN - SCOPUS:84962655251

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BT - IEEE Biomedical Circuits and Systems Conference

PB - Institute of Electrical and Electronics Engineers Inc.

T2 - 11th IEEE Biomedical Circuits and Systems Conference, BioCAS 2015

Y2 - 22 October 2015 through 24 October 2015

ER -

Schroder S, Cecchetto C, Keil S, Mahmud M, Brose E, Dogan O et al. CMOS-compatible purely capacitive interfaces for high-density in-vivo recording from neural tissue. In IEEE Biomedical Circuits and Systems Conference: Engineering for Healthy Minds and Able Bodies, BioCAS 2015 - Proceedings. Institute of Electrical and Electronics Engineers Inc. 2015. 7348358. (IEEE Biomedical Circuits and Systems Conference: Engineering for Healthy Minds and Able Bodies, BioCAS 2015 - Proceedings). doi: 10.1109/BioCAS.2015.7348358

CMOS-compatible purely capacitive interfaces for high-density in-vivo recording from neural tissue

Abstract

Publication series

Conference

Bibliographical note

Keywords

ASJC Scopus subject areas

Access to Document

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