Carbon monoxide gas-sensing properties of electron-beam deposited cerium oxide thin films

S. M.A. Durrani; M. F. Al-Kuhaili; I. A. Bakhtiari

doi:10.1016/j.snb.2008.06.049

Carbon monoxide gas-sensing properties of electron-beam deposited cerium oxide thin films

S. M.A. Durrani^*
, M. F. Al-Kuhaili
, I. A. Bakhtiari

^*Corresponding author for this work

Research output: Contribution to journal › Article › peer-review

57 Scopus citations

Abstract

Thin films of cerium oxide were deposited by electron-beam (e-beam) evaporation on unheated substrates. The films were annealed in air at 500 °C for 2 h, and were characterized using X-ray diffraction, X-ray photoelectron spectroscopy, atomic force microscopy imaging and optical spectrophotometry. The films were investigated for the detection of carbon monoxide, and were found to be highly sensitive. The effect of bias voltage, operating temperature and gas concentration on the performance of the sensor is reported. The sensor response and recovery times were also measured, and were found to be highly efficient.

Original language	English
Pages (from-to)	934-939
Number of pages	6
Journal	Sensors and Actuators, B: Chemical
Volume	134
Issue number	2
DOIs	https://doi.org/10.1016/j.snb.2008.06.049
State	Published - 25 Sep 2008

Bibliographical note

Funding Information:
The support provided by the Deanship of Scientific Research and the Physics Department of King Fahd University of Petroleum and Minerals is acknowledged. This work is a part of project # PH/CERIUM/355.

Keywords

AFM
CO sensor
CeO
Semiconductor gas sensor
Thin film
XPS

ASJC Scopus subject areas

Electronic, Optical and Magnetic Materials
Instrumentation
Condensed Matter Physics
Surfaces, Coatings and Films
Metals and Alloys
Electrical and Electronic Engineering
Materials Chemistry

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10.1016/j.snb.2008.06.049

Cite this

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title = "Carbon monoxide gas-sensing properties of electron-beam deposited cerium oxide thin films",

abstract = "Thin films of cerium oxide were deposited by electron-beam (e-beam) evaporation on unheated substrates. The films were annealed in air at 500 °C for 2 h, and were characterized using X-ray diffraction, X-ray photoelectron spectroscopy, atomic force microscopy imaging and optical spectrophotometry. The films were investigated for the detection of carbon monoxide, and were found to be highly sensitive. The effect of bias voltage, operating temperature and gas concentration on the performance of the sensor is reported. The sensor response and recovery times were also measured, and were found to be highly efficient.",

keywords = "AFM, CO sensor, CeO, Semiconductor gas sensor, Thin film, XPS",

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note = "Funding Information: The support provided by the Deanship of Scientific Research and the Physics Department of King Fahd University of Petroleum and Minerals is acknowledged. This work is a part of project \# PH/CERIUM/355. ",

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doi = "10.1016/j.snb.2008.06.049",

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AU - Durrani, S. M.A.

AU - Al-Kuhaili, M. F.

AU - Bakhtiari, I. A.

N1 - Funding Information: The support provided by the Deanship of Scientific Research and the Physics Department of King Fahd University of Petroleum and Minerals is acknowledged. This work is a part of project # PH/CERIUM/355.

PY - 2008/9/25

Y1 - 2008/9/25

N2 - Thin films of cerium oxide were deposited by electron-beam (e-beam) evaporation on unheated substrates. The films were annealed in air at 500 °C for 2 h, and were characterized using X-ray diffraction, X-ray photoelectron spectroscopy, atomic force microscopy imaging and optical spectrophotometry. The films were investigated for the detection of carbon monoxide, and were found to be highly sensitive. The effect of bias voltage, operating temperature and gas concentration on the performance of the sensor is reported. The sensor response and recovery times were also measured, and were found to be highly efficient.

AB - Thin films of cerium oxide were deposited by electron-beam (e-beam) evaporation on unheated substrates. The films were annealed in air at 500 °C for 2 h, and were characterized using X-ray diffraction, X-ray photoelectron spectroscopy, atomic force microscopy imaging and optical spectrophotometry. The films were investigated for the detection of carbon monoxide, and were found to be highly sensitive. The effect of bias voltage, operating temperature and gas concentration on the performance of the sensor is reported. The sensor response and recovery times were also measured, and were found to be highly efficient.

KW - AFM

KW - CO sensor

KW - CeO

KW - Semiconductor gas sensor

KW - Thin film

KW - XPS

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DO - 10.1016/j.snb.2008.06.049

M3 - Article

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JO - Sensors and Actuators, B: Chemical

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IS - 2

ER -

Carbon monoxide gas-sensing properties of electron-beam deposited cerium oxide thin films

Abstract

Bibliographical note

Keywords

ASJC Scopus subject areas

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