Basic MEMS Actuators

Arash Kheyraddini Mousavi, Zayd Chad Leseman

Research output: Chapter in Book/Report/Conference proceeding › Chapter › peer-review

2 Scopus citations

Original language	English
Title of host publication	Encyclopedia of Nanotechnology
Publisher	Springer Science+Business Media
Pages	173-185
Number of pages	13
ISBN (Electronic)	9789048197514
ISBN (Print)	9789048197507
DOIs	https://doi.org/10.1007/978-90-481-9751-4_292
State	Published - 1 Jan 2012
Externally published	Yes

ASJC Scopus subject areas

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