Basic MEMS Actuators

Research output: Chapter in Book/Report/Conference proceeding › Chapter › peer-review

Original language	English
Title of host publication	Encyclopedia of Nanotechnology
Publisher	Springer Netherlands
Pages	205-220
Number of pages	16
ISBN (Electronic)	9789401797801
ISBN (Print)	9789401797795
DOIs	https://doi.org/10.1007/978-94-017-9780-1_292
State	Published - 1 Jan 2016
Externally published	Yes

ASJC Scopus subject areas

@inbook{cb287bf33ec84d16a3f6b93834831dfe,

title = "Basic MEMS Actuators",

author = "Mousavi, \{Arash Kheyraddini\} and Seyedhamidreza Alaie and Leseman, \{Zayd Chad\}",

year = "2016",

month = jan,

day = "1",

doi = "10.1007/978-94-017-9780-1\_292",

language = "English",

isbn = "9789401797795",

pages = "205--220",

booktitle = "Encyclopedia of Nanotechnology",

publisher = "Springer Netherlands",

address = "Netherlands",

}

TY - CHAP

T1 - Basic MEMS Actuators

AU - Mousavi, Arash Kheyraddini

AU - Alaie, Seyedhamidreza

AU - Leseman, Zayd Chad

PY - 2016/1/1

Y1 - 2016/1/1

UR - https://www.scopus.com/pages/publications/105010479571

U2 - 10.1007/978-94-017-9780-1_292

DO - 10.1007/978-94-017-9780-1_292

M3 - Chapter

AN - SCOPUS:105010479571

SN - 9789401797795

SP - 205

EP - 220

BT - Encyclopedia of Nanotechnology

PB - Springer Netherlands

ER -