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AVOIDANCE OF EXCESSIVE SUBSTRATE TEMPERATURES DURING PLASMA ASSISTED PROCESSES.

  • A. Matthews*
    • *Corresponding author for this work

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

Original languageEnglish
Title of host publicationUnknown Host Publication Title
PublisherMetals Soc (Book 288)
Pages6. 1-6. 6
ISBN (Print)0904357481
StatePublished - 1982

ASJC Scopus subject areas

  • General Engineering

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