Aqueous Media Electrostatic MEMS Sensors

Majed Al-Ghamdi; Resul Saritas; Katherine Stewart; Alison Scott; Mahmoud Khater; Ayman Alneamy; Ahmad Abdel-Aziz; Hamidreza Nafissi; Eihab Abdel-Rahman; Alexander Penlidis

doi:10.1109/TRANSDUCERS.2019.8808826

Aqueous Media Electrostatic MEMS Sensors

Majed Al-Ghamdi, Resul Saritas, Katherine Stewart, Alison Scott, Mahmoud Khater, Ayman Alneamy, Ahmad Abdel-Aziz, Hamidreza Nafissi, Eihab Abdel-Rahman, Alexander Penlidis

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

5 Scopus citations

Abstract

We report a novel electrostatic MEMS sensor to detect solutes in aqueous media. This is the first demonstration of an electrostatic sensor in aqueous media. The sensor is excited electrostatically and its response is measured capacitively. It is equipped with a polymeric sensing material to sorb mercury acetate dissolved in water. It measures the concentration of mercury acetate in water as a shift in resonance frequency. The sensor functionality was demonstrated by comparing its response to a solution of 100 ppm mercury acetate in deionized water and a control fluid of deionized water only.

Original language	English
Title of host publication	2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII, TRANSDUCERS 2019 and EUROSENSORS XXXIII
Publisher	Institute of Electrical and Electronics Engineers Inc.
Pages	1254-1257
Number of pages	4
ISBN (Electronic)	9781728120072
DOIs	https://doi.org/10.1109/TRANSDUCERS.2019.8808826
State	Published - Jun 2019

Publication series

Name	2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII, TRANSDUCERS 2019 and EUROSENSORS XXXIII

Bibliographical note

Publisher Copyright:
© 2019 IEEE.

Keywords

Electrostatic MEMS
chemical sensor
frequency-shift detection

ASJC Scopus subject areas

Process Chemistry and Technology
Spectroscopy
Electrical and Electronic Engineering
Mechanical Engineering
Electronic, Optical and Magnetic Materials
Control and Optimization
Instrumentation

Access to Document

10.1109/TRANSDUCERS.2019.8808826

Cite this

Al-Ghamdi, M., Saritas, R., Stewart, K., Scott, A., Khater, M., Alneamy, A., Abdel-Aziz, A., Nafissi, H., Abdel-Rahman, E., & Penlidis, A. (2019). Aqueous Media Electrostatic MEMS Sensors. In 2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII, TRANSDUCERS 2019 and EUROSENSORS XXXIII (pp. 1254-1257). Article 8808826 (2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII, TRANSDUCERS 2019 and EUROSENSORS XXXIII). Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/TRANSDUCERS.2019.8808826

Al-Ghamdi, Majed ; Saritas, Resul ; Stewart, Katherine et al. / Aqueous Media Electrostatic MEMS Sensors. 2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII, TRANSDUCERS 2019 and EUROSENSORS XXXIII. Institute of Electrical and Electronics Engineers Inc., 2019. pp. 1254-1257 (2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII, TRANSDUCERS 2019 and EUROSENSORS XXXIII).

@inproceedings{9d42b9b34cad4443b707e1335a9790c3,

title = "Aqueous Media Electrostatic MEMS Sensors",

abstract = "We report a novel electrostatic MEMS sensor to detect solutes in aqueous media. This is the first demonstration of an electrostatic sensor in aqueous media. The sensor is excited electrostatically and its response is measured capacitively. It is equipped with a polymeric sensing material to sorb mercury acetate dissolved in water. It measures the concentration of mercury acetate in water as a shift in resonance frequency. The sensor functionality was demonstrated by comparing its response to a solution of 100 ppm mercury acetate in deionized water and a control fluid of deionized water only.",

keywords = "Electrostatic MEMS, chemical sensor, frequency-shift detection",

author = "Majed Al-Ghamdi and Resul Saritas and Katherine Stewart and Alison Scott and Mahmoud Khater and Ayman Alneamy and Ahmad Abdel-Aziz and Hamidreza Nafissi and Eihab Abdel-Rahman and Alexander Penlidis",

note = "Publisher Copyright: {\textcopyright} 2019 IEEE.",

year = "2019",

month = jun,

doi = "10.1109/TRANSDUCERS.2019.8808826",

language = "English",

series = "2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII, TRANSDUCERS 2019 and EUROSENSORS XXXIII",

publisher = "Institute of Electrical and Electronics Engineers Inc.",

pages = "1254--1257",

booktitle = "2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII, TRANSDUCERS 2019 and EUROSENSORS XXXIII",

address = "United States",

}

Al-Ghamdi, M, Saritas, R, Stewart, K, Scott, A, Khater, M, Alneamy, A, Abdel-Aziz, A, Nafissi, H, Abdel-Rahman, E & Penlidis, A 2019, Aqueous Media Electrostatic MEMS Sensors. in 2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII, TRANSDUCERS 2019 and EUROSENSORS XXXIII., 8808826, 2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII, TRANSDUCERS 2019 and EUROSENSORS XXXIII, Institute of Electrical and Electronics Engineers Inc., pp. 1254-1257. https://doi.org/10.1109/TRANSDUCERS.2019.8808826

Aqueous Media Electrostatic MEMS Sensors. / Al-Ghamdi, Majed; Saritas, Resul; Stewart, Katherine et al.
2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII, TRANSDUCERS 2019 and EUROSENSORS XXXIII. Institute of Electrical and Electronics Engineers Inc., 2019. p. 1254-1257 8808826 (2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII, TRANSDUCERS 2019 and EUROSENSORS XXXIII).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

TY - GEN

T1 - Aqueous Media Electrostatic MEMS Sensors

AU - Al-Ghamdi, Majed

AU - Saritas, Resul

AU - Stewart, Katherine

AU - Scott, Alison

AU - Khater, Mahmoud

AU - Alneamy, Ayman

AU - Abdel-Aziz, Ahmad

AU - Nafissi, Hamidreza

AU - Abdel-Rahman, Eihab

AU - Penlidis, Alexander

PY - 2019/6

Y1 - 2019/6

N2 - We report a novel electrostatic MEMS sensor to detect solutes in aqueous media. This is the first demonstration of an electrostatic sensor in aqueous media. The sensor is excited electrostatically and its response is measured capacitively. It is equipped with a polymeric sensing material to sorb mercury acetate dissolved in water. It measures the concentration of mercury acetate in water as a shift in resonance frequency. The sensor functionality was demonstrated by comparing its response to a solution of 100 ppm mercury acetate in deionized water and a control fluid of deionized water only.

AB - We report a novel electrostatic MEMS sensor to detect solutes in aqueous media. This is the first demonstration of an electrostatic sensor in aqueous media. The sensor is excited electrostatically and its response is measured capacitively. It is equipped with a polymeric sensing material to sorb mercury acetate dissolved in water. It measures the concentration of mercury acetate in water as a shift in resonance frequency. The sensor functionality was demonstrated by comparing its response to a solution of 100 ppm mercury acetate in deionized water and a control fluid of deionized water only.

KW - Electrostatic MEMS

KW - chemical sensor

KW - frequency-shift detection

UR - http://www.scopus.com/inward/record.url?scp=85071914517&partnerID=8YFLogxK

U2 - 10.1109/TRANSDUCERS.2019.8808826

DO - 10.1109/TRANSDUCERS.2019.8808826

M3 - Conference contribution

AN - SCOPUS:85071914517

T3 - 2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII, TRANSDUCERS 2019 and EUROSENSORS XXXIII

SP - 1254

EP - 1257

BT - 2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII, TRANSDUCERS 2019 and EUROSENSORS XXXIII

PB - Institute of Electrical and Electronics Engineers Inc.

ER -

Al-Ghamdi M, Saritas R, Stewart K, Scott A, Khater M, Alneamy A et al. Aqueous Media Electrostatic MEMS Sensors. In 2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII, TRANSDUCERS 2019 and EUROSENSORS XXXIII. Institute of Electrical and Electronics Engineers Inc. 2019. p. 1254-1257. 8808826. (2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII, TRANSDUCERS 2019 and EUROSENSORS XXXIII). doi: 10.1109/TRANSDUCERS.2019.8808826

Aqueous Media Electrostatic MEMS Sensors

Abstract

Publication series

Bibliographical note

Keywords

ASJC Scopus subject areas

Access to Document

Fingerprint

Cite this