An experimental and theoretical investigation of double resonance activation in electrostatic MEMS resonators

Mohammad H. Hasan; Hassen M. Ouakad; Nizar R. Jaber; Md Abdullah Al Hafiz; Fadi Alsaleem; Mohammad Younis

doi:10.1115/DETC2018-85887

An experimental and theoretical investigation of double resonance activation in electrostatic MEMS resonators

Mohammad H. Hasan
, Hassen M. Ouakad
, Nizar R. Jaber
, Md Abdullah Al Hafiz
, Fadi Alsaleem
, Mohammad Younis

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

Abstract

Electrostatic micro-electro-mechanical-system (MEMS) devices show great potential in a variety of applications such as sensing and actuation; however, they are hindered by their high input voltage requirement. Double resonance excitation, which activates the system’s mechanical and electrical resonances simultaneously, was recently demonstrated experimentally to alleviate this problem. In this work, we present a mathematical model, based on the Euler Bernoulli beam model coupled with a circuit model, to simulate double resonance in MEMS devices and to shed light more onto the previously published experimental data. We show good agreement between the theoretical simulation and experimental data when the electrical resonance frequency band is sufficiently high.

Original language	English
Title of host publication	23rd Design for Manufacturing and the Life Cycle Conference; 12th International Conference on Micro- and Nanosystems
Publisher	American Society of Mechanical Engineers (ASME)
ISBN (Electronic)	9780791851791
DOIs	https://doi.org/10.1115/DETC2018-85887
State	Published - 2018
Externally published	Yes

Publication series

Name	Proceedings of the ASME Design Engineering Technical Conference
Volume	4

Bibliographical note

Publisher Copyright:
Copyright © 2018 ASME.

ASJC Scopus subject areas

Mechanical Engineering
Computer Graphics and Computer-Aided Design
Computer Science Applications
Modeling and Simulation

Access to Document

10.1115/DETC2018-85887

Cite this

Hasan, M. H., Ouakad, H. M., Jaber, N. R., Al Hafiz, M. A., Alsaleem, F., & Younis, M. (2018). An experimental and theoretical investigation of double resonance activation in electrostatic MEMS resonators. In 23rd Design for Manufacturing and the Life Cycle Conference; 12th International Conference on Micro- and Nanosystems (Proceedings of the ASME Design Engineering Technical Conference; Vol. 4). American Society of Mechanical Engineers (ASME). https://doi.org/10.1115/DETC2018-85887

Hasan, Mohammad H. ; Ouakad, Hassen M. ; Jaber, Nizar R. et al. / An experimental and theoretical investigation of double resonance activation in electrostatic MEMS resonators. 23rd Design for Manufacturing and the Life Cycle Conference; 12th International Conference on Micro- and Nanosystems. American Society of Mechanical Engineers (ASME), 2018. (Proceedings of the ASME Design Engineering Technical Conference).

@inproceedings{440f38c0ad2d41b6b4c862c7c27f8ddd,

title = "An experimental and theoretical investigation of double resonance activation in electrostatic MEMS resonators",

abstract = "Electrostatic micro-electro-mechanical-system (MEMS) devices show great potential in a variety of applications such as sensing and actuation; however, they are hindered by their high input voltage requirement. Double resonance excitation, which activates the system{\textquoteright}s mechanical and electrical resonances simultaneously, was recently demonstrated experimentally to alleviate this problem. In this work, we present a mathematical model, based on the Euler Bernoulli beam model coupled with a circuit model, to simulate double resonance in MEMS devices and to shed light more onto the previously published experimental data. We show good agreement between the theoretical simulation and experimental data when the electrical resonance frequency band is sufficiently high.",

author = "Hasan, \{Mohammad H.\} and Ouakad, \{Hassen M.\} and Jaber, \{Nizar R.\} and \{Al Hafiz\}, \{Md Abdullah\} and Fadi Alsaleem and Mohammad Younis",

note = "Publisher Copyright: Copyright {\textcopyright} 2018 ASME.",

year = "2018",

doi = "10.1115/DETC2018-85887",

language = "English",

series = "Proceedings of the ASME Design Engineering Technical Conference",

publisher = "American Society of Mechanical Engineers (ASME)",

booktitle = "23rd Design for Manufacturing and the Life Cycle Conference; 12th International Conference on Micro- and Nanosystems",

}

Hasan, MH, Ouakad, HM, Jaber, NR, Al Hafiz, MA, Alsaleem, F & Younis, M 2018, An experimental and theoretical investigation of double resonance activation in electrostatic MEMS resonators. in 23rd Design for Manufacturing and the Life Cycle Conference; 12th International Conference on Micro- and Nanosystems. Proceedings of the ASME Design Engineering Technical Conference, vol. 4, American Society of Mechanical Engineers (ASME). https://doi.org/10.1115/DETC2018-85887

An experimental and theoretical investigation of double resonance activation in electrostatic MEMS resonators. / Hasan, Mohammad H.; Ouakad, Hassen M.; Jaber, Nizar R. et al.
23rd Design for Manufacturing and the Life Cycle Conference; 12th International Conference on Micro- and Nanosystems. American Society of Mechanical Engineers (ASME), 2018. (Proceedings of the ASME Design Engineering Technical Conference; Vol. 4).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

TY - GEN

T1 - An experimental and theoretical investigation of double resonance activation in electrostatic MEMS resonators

AU - Hasan, Mohammad H.

AU - Ouakad, Hassen M.

AU - Jaber, Nizar R.

AU - Al Hafiz, Md Abdullah

AU - Alsaleem, Fadi

AU - Younis, Mohammad

PY - 2018

Y1 - 2018

N2 - Electrostatic micro-electro-mechanical-system (MEMS) devices show great potential in a variety of applications such as sensing and actuation; however, they are hindered by their high input voltage requirement. Double resonance excitation, which activates the system’s mechanical and electrical resonances simultaneously, was recently demonstrated experimentally to alleviate this problem. In this work, we present a mathematical model, based on the Euler Bernoulli beam model coupled with a circuit model, to simulate double resonance in MEMS devices and to shed light more onto the previously published experimental data. We show good agreement between the theoretical simulation and experimental data when the electrical resonance frequency band is sufficiently high.

AB - Electrostatic micro-electro-mechanical-system (MEMS) devices show great potential in a variety of applications such as sensing and actuation; however, they are hindered by their high input voltage requirement. Double resonance excitation, which activates the system’s mechanical and electrical resonances simultaneously, was recently demonstrated experimentally to alleviate this problem. In this work, we present a mathematical model, based on the Euler Bernoulli beam model coupled with a circuit model, to simulate double resonance in MEMS devices and to shed light more onto the previously published experimental data. We show good agreement between the theoretical simulation and experimental data when the electrical resonance frequency band is sufficiently high.

UR - https://www.scopus.com/pages/publications/85056825999

U2 - 10.1115/DETC2018-85887

DO - 10.1115/DETC2018-85887

M3 - Conference contribution

AN - SCOPUS:85056825999

T3 - Proceedings of the ASME Design Engineering Technical Conference

BT - 23rd Design for Manufacturing and the Life Cycle Conference; 12th International Conference on Micro- and Nanosystems

PB - American Society of Mechanical Engineers (ASME)

ER -

Hasan MH, Ouakad HM, Jaber NR, Al Hafiz MA, Alsaleem F, Younis M. An experimental and theoretical investigation of double resonance activation in electrostatic MEMS resonators. In 23rd Design for Manufacturing and the Life Cycle Conference; 12th International Conference on Micro- and Nanosystems. American Society of Mechanical Engineers (ASME). 2018. (Proceedings of the ASME Design Engineering Technical Conference). doi: 10.1115/DETC2018-85887

An experimental and theoretical investigation of double resonance activation in electrostatic MEMS resonators

Abstract

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Bibliographical note

ASJC Scopus subject areas

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Cite this