An electrically actuated microbeam-based mems device: Experimental and theoretical investigation

Engineering

• Experimental Investigation 100%
• Theoretical Investigation 100%
• Microelectromechanical System 100%
• Mem Device 100%
• Nonlinear Behavior 50%
• Degree of Freedom 50%
• Computer Simulation 50%
• Dynamic Behavior 50%
• Data Show 50%
• Computational Efficiency 50%
• Reduced Order Model 50%
• Single Degree 50%
• Sweep Frequency 50%
• Parametric Identification 50%
• Experimental Response 50%
• Nonlinear Feature 50%
• Models 50%
• Low Value 50%
• Non-Linear Dynamics 50%
• Natural Frequency 50%
• High Frequency 50%