Adjustable sensitivity MEMS magnetic sensor

Sangtak Park; Majed S. Al-Ghamdi; Mahmoud Khater; Eihab Abdel-Rahman; Mustafa Yavuz

doi:10.1115/DETC2014-35004

Adjustable sensitivity MEMS magnetic sensor

Sangtak Park, Majed S. Al-Ghamdi, Mahmoud Khater, Eihab Abdel-Rahman, Mustafa Yavuz

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

1 Scopus citations

Abstract

This paper introduces a novel MEMS magnetic field sensor based on the Lorentz force. It measures torsional vibrations excited via Lorentz force. The sensor sensitivity and dynamic range can be tuned by varying an electrostatic bias. Experimental demonstration shows that the sensor sensitivity can be changed from 0.7 (m/s)/T at 6 V DC bias to 1.4 (m/s)/T at 0 V DC bias.

Original language	English
Title of host publication	19th Design for Manufacturing and the Life Cycle Conference; 8th International Conference on Micro- andNanosystems
Publisher	American Society of Mechanical Engineers (ASME)
ISBN (Electronic)	9780791846353
DOIs	https://doi.org/10.1115/DETC2014-35004
State	Published - 2014
Externally published	Yes

Publication series

Name	Proceedings of the ASME Design Engineering Technical Conference
Volume	4

Bibliographical note

Publisher Copyright:
Copyright © 2014 by ASME.

ASJC Scopus subject areas

Modeling and Simulation
Mechanical Engineering
Computer Science Applications
Computer Graphics and Computer-Aided Design

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10.1115/DETC2014-35004

Cite this

Park, S., Al-Ghamdi, M. S., Khater, M., Abdel-Rahman, E., & Yavuz, M. (2014). Adjustable sensitivity MEMS magnetic sensor. In 19th Design for Manufacturing and the Life Cycle Conference; 8th International Conference on Micro- andNanosystems (Proceedings of the ASME Design Engineering Technical Conference; Vol. 4). American Society of Mechanical Engineers (ASME). https://doi.org/10.1115/DETC2014-35004

@inproceedings{e5daffbf6b1644d3a4d29046749c28bf,

title = "Adjustable sensitivity MEMS magnetic sensor",

abstract = "This paper introduces a novel MEMS magnetic field sensor based on the Lorentz force. It measures torsional vibrations excited via Lorentz force. The sensor sensitivity and dynamic range can be tuned by varying an electrostatic bias. Experimental demonstration shows that the sensor sensitivity can be changed from 0.7 (m/s)/T at 6 V DC bias to 1.4 (m/s)/T at 0 V DC bias.",

author = "Sangtak Park and Al-Ghamdi, \{Majed S.\} and Mahmoud Khater and Eihab Abdel-Rahman and Mustafa Yavuz",

note = "Publisher Copyright: Copyright {\textcopyright} 2014 by ASME.",

year = "2014",

doi = "10.1115/DETC2014-35004",

language = "English",

series = "Proceedings of the ASME Design Engineering Technical Conference",

publisher = "American Society of Mechanical Engineers (ASME)",

booktitle = "19th Design for Manufacturing and the Life Cycle Conference; 8th International Conference on Micro- andNanosystems",

}

Park, S, Al-Ghamdi, MS, Khater, M, Abdel-Rahman, E & Yavuz, M 2014, Adjustable sensitivity MEMS magnetic sensor. in 19th Design for Manufacturing and the Life Cycle Conference; 8th International Conference on Micro- andNanosystems. Proceedings of the ASME Design Engineering Technical Conference, vol. 4, American Society of Mechanical Engineers (ASME). https://doi.org/10.1115/DETC2014-35004

Adjustable sensitivity MEMS magnetic sensor. / Park, Sangtak; Al-Ghamdi, Majed S.; Khater, Mahmoud et al.
19th Design for Manufacturing and the Life Cycle Conference; 8th International Conference on Micro- andNanosystems. American Society of Mechanical Engineers (ASME), 2014. (Proceedings of the ASME Design Engineering Technical Conference; Vol. 4).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

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AU - Khater, Mahmoud

AU - Abdel-Rahman, Eihab

AU - Yavuz, Mustafa

PY - 2014

Y1 - 2014

N2 - This paper introduces a novel MEMS magnetic field sensor based on the Lorentz force. It measures torsional vibrations excited via Lorentz force. The sensor sensitivity and dynamic range can be tuned by varying an electrostatic bias. Experimental demonstration shows that the sensor sensitivity can be changed from 0.7 (m/s)/T at 6 V DC bias to 1.4 (m/s)/T at 0 V DC bias.

AB - This paper introduces a novel MEMS magnetic field sensor based on the Lorentz force. It measures torsional vibrations excited via Lorentz force. The sensor sensitivity and dynamic range can be tuned by varying an electrostatic bias. Experimental demonstration shows that the sensor sensitivity can be changed from 0.7 (m/s)/T at 6 V DC bias to 1.4 (m/s)/T at 0 V DC bias.

UR - https://www.scopus.com/pages/publications/84961293899

U2 - 10.1115/DETC2014-35004

DO - 10.1115/DETC2014-35004

M3 - Conference contribution

AN - SCOPUS:84961293899

T3 - Proceedings of the ASME Design Engineering Technical Conference

BT - 19th Design for Manufacturing and the Life Cycle Conference; 8th International Conference on Micro- andNanosystems

PB - American Society of Mechanical Engineers (ASME)

ER -

Park S, Al-Ghamdi MS, Khater M, Abdel-Rahman E, Yavuz M. Adjustable sensitivity MEMS magnetic sensor. In 19th Design for Manufacturing and the Life Cycle Conference; 8th International Conference on Micro- andNanosystems. American Society of Mechanical Engineers (ASME). 2014. (Proceedings of the ASME Design Engineering Technical Conference). doi: 10.1115/DETC2014-35004

Adjustable sensitivity MEMS magnetic sensor

Abstract

Publication series

Bibliographical note

ASJC Scopus subject areas

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Cite this