A Tunable MEMS Magnetic Sensor

Sangtak Park; Majed S. Al-Ghamdi; Mahmoud E. Khater; Eihab Abdel-Rahman

doi:10.1109/JMEMS.2016.2633818

A Tunable MEMS Magnetic Sensor

Sangtak Park, Majed S. Al-Ghamdi, Mahmoud E. Khater, Eihab Abdel-Rahman

Research output: Contribution to journal › Article › peer-review

21 Scopus citations

Abstract

This paper introduces a tunable MEMS magnetic field sensor. It uses torsional vibrations excited by Lorentz force to measure the strength of external magnetic fields. The sensor sensitivity and dynamic range can be tuned on-the-fly by varying its dc bias. Experimental demonstration shows that the sensor sensitivity can be tuned in the range of 0.139-0.283V/mT as the bias voltage varies from 0 to 6V in air and in the range of 0.038-0.955V/mT as the bias voltage varies from 0 to 5V in vacuum. While the sensor can operate in either a forced or a resonant mode, it achieves higher sensitivity and bandwidth when operating near its first torsional resonance.

Original language	English
Article number	7792201
Pages (from-to)	255-263
Number of pages	9
Journal	Journal of Microelectromechanical Systems
Volume	26
Issue number	1
DOIs	https://doi.org/10.1109/JMEMS.2016.2633818
State	Published - Feb 2017

Bibliographical note

Publisher Copyright:
© 1992-2012 IEEE.

Keywords

MEMS
Magnetic sensor
torsional mode

ASJC Scopus subject areas

Mechanical Engineering
Electrical and Electronic Engineering

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10.1109/JMEMS.2016.2633818

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AB - This paper introduces a tunable MEMS magnetic field sensor. It uses torsional vibrations excited by Lorentz force to measure the strength of external magnetic fields. The sensor sensitivity and dynamic range can be tuned on-the-fly by varying its dc bias. Experimental demonstration shows that the sensor sensitivity can be tuned in the range of 0.139-0.283V/mT as the bias voltage varies from 0 to 6V in air and in the range of 0.038-0.955V/mT as the bias voltage varies from 0 to 5V in vacuum. While the sensor can operate in either a forced or a resonant mode, it achieves higher sensitivity and bandwidth when operating near its first torsional resonance.

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A Tunable MEMS Magnetic Sensor

Abstract

Bibliographical note

Keywords

ASJC Scopus subject areas

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