A Sensitive Resonant Gas Sensor Based on Multimode Excitation of a Buckled Beam

  • Amal Z. Hajjaj
  • , Nizar Jaber
  • , Nouha Alcheikh
  • , Mohammad I. Younis

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

6 Scopus citations

Abstract

We report a new gas sensing technique based on the simultaneous tracking of multiple modes of vibration of an electrothermally heated bridge resonator operated near the buckling point. The proposed technique maximizes the sensitivity of the sensor to the change in the gas concentration and enables the identification of the gas type without the need for selective coating. Under the same gas concentration value, the reported measurements demonstrate a 200% change in the frequency in contrast to 0.5% using the conventional technique based on resistance measurements. The proposed method is simple in principle and design and is promising for achieving practical low-cost gas sensors.

Original languageEnglish
Title of host publication2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII, TRANSDUCERS 2019 and EUROSENSORS XXXIII
PublisherInstitute of Electrical and Electronics Engineers Inc.
Pages769-772
Number of pages4
ISBN (Electronic)9781728120072
DOIs
StatePublished - Jun 2019
Externally publishedYes

Publication series

Name2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII, TRANSDUCERS 2019 and EUROSENSORS XXXIII

Bibliographical note

Publisher Copyright:
© 2019 IEEE.

Keywords

  • Gas sensor
  • bridge resonator
  • buckling point
  • electrothermally heated
  • thermal conductivity

ASJC Scopus subject areas

  • Process Chemistry and Technology
  • Spectroscopy
  • Electrical and Electronic Engineering
  • Mechanical Engineering
  • Electronic, Optical and Magnetic Materials
  • Control and Optimization
  • Instrumentation

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