Abstract
We report a new gas sensing technique based on the simultaneous tracking of multiple modes of vibration of an electrothermally heated bridge resonator operated near the buckling point. The proposed technique maximizes the sensitivity of the sensor to the change in the gas concentration and enables the identification of the gas type without the need for selective coating. Under the same gas concentration value, the reported measurements demonstrate a 200% change in the frequency in contrast to 0.5% using the conventional technique based on resistance measurements. The proposed method is simple in principle and design and is promising for achieving practical low-cost gas sensors.
| Original language | English |
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| Title of host publication | 2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII, TRANSDUCERS 2019 and EUROSENSORS XXXIII |
| Publisher | Institute of Electrical and Electronics Engineers Inc. |
| Pages | 769-772 |
| Number of pages | 4 |
| ISBN (Electronic) | 9781728120072 |
| DOIs | |
| State | Published - Jun 2019 |
| Externally published | Yes |
Publication series
| Name | 2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII, TRANSDUCERS 2019 and EUROSENSORS XXXIII |
|---|
Bibliographical note
Publisher Copyright:© 2019 IEEE.
Keywords
- Gas sensor
- bridge resonator
- buckling point
- electrothermally heated
- thermal conductivity
ASJC Scopus subject areas
- Process Chemistry and Technology
- Spectroscopy
- Electrical and Electronic Engineering
- Mechanical Engineering
- Electronic, Optical and Magnetic Materials
- Control and Optimization
- Instrumentation