A review of piezoelectric MEMS sensors and actuators for gas detection application

Saeed S. Ba Hashwan*, Mohd Haris Md Khir, Illani Mohd Nawi, Mohamad Radzi Ahmad, Mehwish Hanif, Furqan Zahoor, Y. Al-Douri, Abdullah Saleh Algamili, Usman Isyaku Bature, Sami Sultan Alabsi, Mohammed O.Ba Sabbea, Muhammad Junaid

*Corresponding author for this work

Research output: Contribution to journalReview articlepeer-review

15 Scopus citations

Abstract

Piezoelectric microelectromechanical system (piezo-MEMS)-based mass sensors including the piezoelectric microcantilevers, surface acoustic waves (SAW), quartz crystal microbalance (QCM), piezoelectric micromachined ultrasonic transducer (PMUT), and film bulk acoustic wave resonators (FBAR) are highlighted as suitable candidates for highly sensitive gas detection application. This paper presents the piezo-MEMS gas sensors’ characteristics such as their miniaturized structure, the capability of integration with readout circuit, and fabrication feasibility using multiuser technologies. The development of the piezoelectric MEMS gas sensors is investigated for the application of low-level concentration gas molecules detection. In this work, the various types of gas sensors based on piezoelectricity are investigated extensively including their operating principle, besides their material parameters as well as the critical design parameters, the device structures, and their sensing materials including the polymers, carbon, metal–organic framework, and graphene.

Original languageEnglish
Article number25
JournalDiscover Nano
Volume18
Issue number1
DOIs
StatePublished - 2023
Externally publishedYes

Bibliographical note

Publisher Copyright:
© 2023, The Author(s).

Keywords

  • BAW
  • FBAR
  • Gas sensors
  • Microcantilever
  • Microelectromechanical system (MEMS)
  • PMUT
  • Piezoelectric actuators
  • QCM
  • SAW
  • Sensing layers
  • Sensing principle

ASJC Scopus subject areas

  • General Materials Science
  • Condensed Matter Physics

Fingerprint

Dive into the research topics of 'A review of piezoelectric MEMS sensors and actuators for gas detection application'. Together they form a unique fingerprint.

Cite this