Abstract
A novel2flash erase EEPROM, memory cell structure is presented. The cell uses triple poly layers and two independent N+implants. The first poly is used as the control gate, the second poly as the floating gate and the third poly as arc erase electrode. Cell programminng is avalanche injection of hot electrons into the floating gate, while erasure is performed by asperities-aided Fowler Nordheim tunneling of electrons. Asperities introduced at the top surface of the floating poly gate allow using thicker interpoly oxide at lower erase voltage and less than 0.1 second erase time.
| Original language | English |
|---|---|
| Title of host publication | ESSDERC 1990 - 20th European Solid State Device Research Conference |
| Editors | W. Eccleston, P. J. Rosser |
| Publisher | IEEE Computer Society |
| Pages | 177-180 |
| Number of pages | 4 |
| ISBN (Electronic) | 0750300655 |
| State | Published - 1990 |
Publication series
| Name | European Solid-State Device Research Conference |
|---|---|
| ISSN (Print) | 1930-8876 |
Bibliographical note
Publisher Copyright:© 1990 IOP Publishing Ltd.
ASJC Scopus subject areas
- Electrical and Electronic Engineering
- Safety, Risk, Reliability and Quality