Abstract
A method for beam particle distribution measurements of a microprobe is presented. The proposed method over-comes the disadvantages of the conventional technique of scanning the beam over a metal edge, which is limited to one dimension and possesses statistical uncertainty. The proposed method is based on scanning the beam in two dimensions over a very small aperture (pinhole) located in the image plane and measuring the beam intensity passing through the pinhole as a function of the scan position. Based on the reasonably accurate simulation of an experiment obtained with a pinhole prototype, the simulation program was employed to propose a pinhole design with a lateral resolution sufficient to resolve the particle distribution within a beam spot of 1 μm in diameter.
| Original language | English |
|---|---|
| Pages (from-to) | 66-73 |
| Number of pages | 8 |
| Journal | Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms |
| Volume | 158 |
| Issue number | 1-4 |
| DOIs | |
| State | Published - 1999 |
Bibliographical note
Funding Information:The author would like to acknowledge the support of King Fahd University of Petroleum and Minerals through the Center for Applied Physical Sciences of the Research Institute. Thanks are due to Mr. M. Pillai for assistance during the experimental work.
Keywords
- Beam optics
ASJC Scopus subject areas
- Nuclear and High Energy Physics
- Instrumentation