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A MEMS Micro Force Sensor Based on A Laterally Movable Gate Field-Effect Transistor (LMGFET) with A Novel Decoupling Sandwich Structure

  • Wendi Gao
  • , Zhixia Qiao
  • , Xiangguang Han
  • , Xiaozhang Wang
  • , Adnan Shakoor
  • , Cunlang Liu
  • , Dejiang Lu*
  • , Ping Yang
  • , Libo Zhao
  • , Yonglu Wang
  • , Jiuhong Wang
  • , Zhuangde Jiang
  • , Dong Sun
    • *Corresponding author for this work

Research output: Contribution to journal › Article › peer-review

15 Scopus citations

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