A mass sensing technique for electrostatically-actuated MEMS

Mahmoud E. Khater; Eihab M. Abdel-Rehman; Ali H. Nayfeh

doi:10.1115/DETC2009-87551

A mass sensing technique for electrostatically-actuated MEMS

Mahmoud E. Khater
, Eihab M. Abdel-Rehman
, Ali H. Nayfeh

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

9 Scopus citations

Abstract

We propose a technique to increase the sensitivity and simplify the process of measuring minute masses using electrostatically-actuated MEMS. The sensor is composed of a cantilever beam connected to a rigid plate at its free end and coupled to an electrode underneath it. The method depends on the observation that the sensitivity of an electrostatically-actuated MEMS is highly enhanced when the driving voltage is close to the pull-in limit. We study two cases: the device actuated by a static force (DC voltage) and a dynamic force (combined AC and DC voltage). Sensitivity analysis is used to estimate the minimum detectable mass near static pull-in and near a dynamic pull-in point due to a cyclic-fold bifurcation.

Original language	English
Title of host publication	Proceedings of the ASME International Design Engineering Technical Conferences and Computers and Information in Engineering Conference 2009, DETC2009
Pages	655-661
Number of pages	7
DOIs	https://doi.org/10.1115/DETC2009-87551
State	Published - 2010
Externally published	Yes

Publication series

Name	Proceedings of the ASME International Design Engineering Technical Conferences and Computers and Information in Engineering Conference 2009, DETC2009
Volume	6

ASJC Scopus subject areas

Computer Networks and Communications
Hardware and Architecture
Electrical and Electronic Engineering

Access to Document

10.1115/DETC2009-87551

Cite this

Khater, M. E., Abdel-Rehman, E. M., & Nayfeh, A. H. (2010). A mass sensing technique for electrostatically-actuated MEMS. In Proceedings of the ASME International Design Engineering Technical Conferences and Computers and Information in Engineering Conference 2009, DETC2009 (pp. 655-661). (Proceedings of the ASME International Design Engineering Technical Conferences and Computers and Information in Engineering Conference 2009, DETC2009; Vol. 6). https://doi.org/10.1115/DETC2009-87551

Khater, Mahmoud E. ; Abdel-Rehman, Eihab M. ; Nayfeh, Ali H. / A mass sensing technique for electrostatically-actuated MEMS. Proceedings of the ASME International Design Engineering Technical Conferences and Computers and Information in Engineering Conference 2009, DETC2009. 2010. pp. 655-661 (Proceedings of the ASME International Design Engineering Technical Conferences and Computers and Information in Engineering Conference 2009, DETC2009).

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title = "A mass sensing technique for electrostatically-actuated MEMS",

abstract = "We propose a technique to increase the sensitivity and simplify the process of measuring minute masses using electrostatically-actuated MEMS. The sensor is composed of a cantilever beam connected to a rigid plate at its free end and coupled to an electrode underneath it. The method depends on the observation that the sensitivity of an electrostatically-actuated MEMS is highly enhanced when the driving voltage is close to the pull-in limit. We study two cases: the device actuated by a static force (DC voltage) and a dynamic force (combined AC and DC voltage). Sensitivity analysis is used to estimate the minimum detectable mass near static pull-in and near a dynamic pull-in point due to a cyclic-fold bifurcation.",

author = "Khater, \{Mahmoud E.\} and Abdel-Rehman, \{Eihab M.\} and Nayfeh, \{Ali H.\}",

year = "2010",

doi = "10.1115/DETC2009-87551",

language = "English",

isbn = "9780791849033",

series = "Proceedings of the ASME International Design Engineering Technical Conferences and Computers and Information in Engineering Conference 2009, DETC2009",

pages = "655--661",

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}

Khater, ME, Abdel-Rehman, EM & Nayfeh, AH 2010, A mass sensing technique for electrostatically-actuated MEMS. in Proceedings of the ASME International Design Engineering Technical Conferences and Computers and Information in Engineering Conference 2009, DETC2009. Proceedings of the ASME International Design Engineering Technical Conferences and Computers and Information in Engineering Conference 2009, DETC2009, vol. 6, pp. 655-661. https://doi.org/10.1115/DETC2009-87551

A mass sensing technique for electrostatically-actuated MEMS. / Khater, Mahmoud E.; Abdel-Rehman, Eihab M.; Nayfeh, Ali H.
Proceedings of the ASME International Design Engineering Technical Conferences and Computers and Information in Engineering Conference 2009, DETC2009. 2010. p. 655-661 (Proceedings of the ASME International Design Engineering Technical Conferences and Computers and Information in Engineering Conference 2009, DETC2009; Vol. 6).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

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N2 - We propose a technique to increase the sensitivity and simplify the process of measuring minute masses using electrostatically-actuated MEMS. The sensor is composed of a cantilever beam connected to a rigid plate at its free end and coupled to an electrode underneath it. The method depends on the observation that the sensitivity of an electrostatically-actuated MEMS is highly enhanced when the driving voltage is close to the pull-in limit. We study two cases: the device actuated by a static force (DC voltage) and a dynamic force (combined AC and DC voltage). Sensitivity analysis is used to estimate the minimum detectable mass near static pull-in and near a dynamic pull-in point due to a cyclic-fold bifurcation.

AB - We propose a technique to increase the sensitivity and simplify the process of measuring minute masses using electrostatically-actuated MEMS. The sensor is composed of a cantilever beam connected to a rigid plate at its free end and coupled to an electrode underneath it. The method depends on the observation that the sensitivity of an electrostatically-actuated MEMS is highly enhanced when the driving voltage is close to the pull-in limit. We study two cases: the device actuated by a static force (DC voltage) and a dynamic force (combined AC and DC voltage). Sensitivity analysis is used to estimate the minimum detectable mass near static pull-in and near a dynamic pull-in point due to a cyclic-fold bifurcation.

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Khater ME, Abdel-Rehman EM, Nayfeh AH. A mass sensing technique for electrostatically-actuated MEMS. In Proceedings of the ASME International Design Engineering Technical Conferences and Computers and Information in Engineering Conference 2009, DETC2009. 2010. p. 655-661. (Proceedings of the ASME International Design Engineering Technical Conferences and Computers and Information in Engineering Conference 2009, DETC2009). doi: 10.1115/DETC2009-87551

A mass sensing technique for electrostatically-actuated MEMS

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