A mass sensing technique for electrostatically-actuated MEMS

Mahmoud E. Khater; Eihab M. Abdel-Rahman; Ali H. Nayfeh

doi:10.1115/DETC2009-87551

A mass sensing technique for electrostatically-actuated MEMS

Mahmoud E. Khater^*
, Eihab M. Abdel-Rahman
, Ali H. Nayfeh

^*Corresponding author for this work

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

3 Scopus citations

Abstract

We propose a technique to increase the sensitivity and simplify the process of measuring minute masses using electrostatically-actuated MEMS. The sensor is composed of a cantilever beam connected to a rigid plate at its free end and coupled to an electrode underneath it. The method depends on the observation that the sensitivity of an electrostatically-actuated MEMS is highly enhanced when the driving voltage is close to the pull-in limit. We study two cases: the device actuated by a static force (DC voltage) and a dynamic force (combined AC and DC voltage). Sensitivity analysis is used to estimate the minimum detectable mass near static pull-in and near a dynamic pullin point due to a cyclic-fold bifurcation.

Original language	English
Title of host publication	ASME 2009 International Design Engineering Technical Conferences and Computers and Information in Engineering Conference, IDETC/CIE2009
Pages	655-661
Number of pages	7
DOIs	https://doi.org/10.1115/DETC2009-87551
State	Published - 2009
Externally published	Yes

Publication series

Name	Proceedings of the ASME Design Engineering Technical Conference
Volume	6

ASJC Scopus subject areas

Modeling and Simulation
Mechanical Engineering
Computer Science Applications
Computer Graphics and Computer-Aided Design

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10.1115/DETC2009-87551

Cite this

Khater, M. E., Abdel-Rahman, E. M., & Nayfeh, A. H. (2009). A mass sensing technique for electrostatically-actuated MEMS. In ASME 2009 International Design Engineering Technical Conferences and Computers and Information in Engineering Conference, IDETC/CIE2009 (pp. 655-661). (Proceedings of the ASME Design Engineering Technical Conference; Vol. 6). https://doi.org/10.1115/DETC2009-87551

@inproceedings{e6b1737a41d046d7b704054c74d9cba8,

title = "A mass sensing technique for electrostatically-actuated MEMS",

abstract = "We propose a technique to increase the sensitivity and simplify the process of measuring minute masses using electrostatically-actuated MEMS. The sensor is composed of a cantilever beam connected to a rigid plate at its free end and coupled to an electrode underneath it. The method depends on the observation that the sensitivity of an electrostatically-actuated MEMS is highly enhanced when the driving voltage is close to the pull-in limit. We study two cases: the device actuated by a static force (DC voltage) and a dynamic force (combined AC and DC voltage). Sensitivity analysis is used to estimate the minimum detectable mass near static pull-in and near a dynamic pullin point due to a cyclic-fold bifurcation.",

author = "Khater, \{Mahmoud E.\} and Abdel-Rahman, \{Eihab M.\} and Nayfeh, \{Ali H.\}",

year = "2009",

doi = "10.1115/DETC2009-87551",

language = "English",

isbn = "9780791849033",

series = "Proceedings of the ASME Design Engineering Technical Conference",

pages = "655--661",

booktitle = "ASME 2009 International Design Engineering Technical Conferences and Computers and Information in Engineering Conference, IDETC/CIE2009",

}

Khater, ME, Abdel-Rahman, EM & Nayfeh, AH 2009, A mass sensing technique for electrostatically-actuated MEMS. in ASME 2009 International Design Engineering Technical Conferences and Computers and Information in Engineering Conference, IDETC/CIE2009. Proceedings of the ASME Design Engineering Technical Conference, vol. 6, pp. 655-661. https://doi.org/10.1115/DETC2009-87551

A mass sensing technique for electrostatically-actuated MEMS. / Khater, Mahmoud E.; Abdel-Rahman, Eihab M.; Nayfeh, Ali H.
ASME 2009 International Design Engineering Technical Conferences and Computers and Information in Engineering Conference, IDETC/CIE2009. 2009. p. 655-661 (Proceedings of the ASME Design Engineering Technical Conference; Vol. 6).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

TY - GEN

T1 - A mass sensing technique for electrostatically-actuated MEMS

AU - Khater, Mahmoud E.

AU - Abdel-Rahman, Eihab M.

AU - Nayfeh, Ali H.

PY - 2009

Y1 - 2009

N2 - We propose a technique to increase the sensitivity and simplify the process of measuring minute masses using electrostatically-actuated MEMS. The sensor is composed of a cantilever beam connected to a rigid plate at its free end and coupled to an electrode underneath it. The method depends on the observation that the sensitivity of an electrostatically-actuated MEMS is highly enhanced when the driving voltage is close to the pull-in limit. We study two cases: the device actuated by a static force (DC voltage) and a dynamic force (combined AC and DC voltage). Sensitivity analysis is used to estimate the minimum detectable mass near static pull-in and near a dynamic pullin point due to a cyclic-fold bifurcation.

AB - We propose a technique to increase the sensitivity and simplify the process of measuring minute masses using electrostatically-actuated MEMS. The sensor is composed of a cantilever beam connected to a rigid plate at its free end and coupled to an electrode underneath it. The method depends on the observation that the sensitivity of an electrostatically-actuated MEMS is highly enhanced when the driving voltage is close to the pull-in limit. We study two cases: the device actuated by a static force (DC voltage) and a dynamic force (combined AC and DC voltage). Sensitivity analysis is used to estimate the minimum detectable mass near static pull-in and near a dynamic pullin point due to a cyclic-fold bifurcation.

UR - https://www.scopus.com/pages/publications/82155201696

U2 - 10.1115/DETC2009-87551

DO - 10.1115/DETC2009-87551

M3 - Conference contribution

AN - SCOPUS:82155201696

SN - 9780791849033

T3 - Proceedings of the ASME Design Engineering Technical Conference

SP - 655

EP - 661

BT - ASME 2009 International Design Engineering Technical Conferences and Computers and Information in Engineering Conference, IDETC/CIE2009

ER -

A mass sensing technique for electrostatically-actuated MEMS

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ASJC Scopus subject areas

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