TY - GEN
T1 - A fracture mechanics model for the repair of microcantilevers by laser induced stress waves
AU - Leseman, Zayd C.
AU - Koppaka, Sai
AU - Mackin, Thomas J.
PY - 2005
Y1 - 2005
N2 - A fracture mechanics model was developed, and experimentally verified, to model stress wave repair of stiction-failed microcantilevers. This model allows us to predict accurately the number of laser pulses, at a specific fluence and wavelength, required to fully repair stiction-failed microcantilevers. The proposed fracture mechanics model includes the strain energy stored in a stiction-failed microcantilever and the strain energy supplied by laser induced stress-waves propagating in the material. The 'unstuck' portion of the microcantilever is modeled as a crack so that crack growth reduces the stiction-failed length of the microcantilever. A full range of experiments have been performed to validate the model. Experiments using laser fluences ranging from 0.5 kJ/m2 - 45 kJ/m2 at two different wavelengths have been performed. The experiments are in good agreement with the model predictions. Additionally we have identified practical ranges for irradiation, including a lower bound fluence below which repair is impractical, and an upper bound above which damage to the substrate and microcantilevers occurs.
AB - A fracture mechanics model was developed, and experimentally verified, to model stress wave repair of stiction-failed microcantilevers. This model allows us to predict accurately the number of laser pulses, at a specific fluence and wavelength, required to fully repair stiction-failed microcantilevers. The proposed fracture mechanics model includes the strain energy stored in a stiction-failed microcantilever and the strain energy supplied by laser induced stress-waves propagating in the material. The 'unstuck' portion of the microcantilever is modeled as a crack so that crack growth reduces the stiction-failed length of the microcantilever. A full range of experiments have been performed to validate the model. Experiments using laser fluences ranging from 0.5 kJ/m2 - 45 kJ/m2 at two different wavelengths have been performed. The experiments are in good agreement with the model predictions. Additionally we have identified practical ranges for irradiation, including a lower bound fluence below which repair is impractical, and an upper bound above which damage to the substrate and microcantilevers occurs.
UR - https://www.scopus.com/pages/publications/33645999357
U2 - 10.1115/IMECE2005-81000
DO - 10.1115/IMECE2005-81000
M3 - Conference contribution
AN - SCOPUS:33645999357
SN - 079184224X
SN - 9780791842249
T3 - American Society of Mechanical Engineers, Micro-Electro Mechanical Systems Division, (Publications) MEMS
SP - 353
EP - 358
BT - American Society of Mechanical Engineers, Micro-Electro Mechanical Systems Division, (Publications) MEMS
T2 - 2005 ASME International Mecahnical Engineering Congress and Exposition, IMECE 2005
Y2 - 5 November 2005 through 11 November 2005
ER -