A Compact High-Sensitivity Temperature Sensor using an Encapsulated Clamped-Clamped Mems Beam Resonator

Xuecui Zou; Sally Ahmed; Nizar Jaber; Hossein Fariborzi

doi:10.1109/Transducers50396.2021.9495651

A Compact High-Sensitivity Temperature Sensor using an Encapsulated Clamped-Clamped Mems Beam Resonator

Xuecui Zou, Sally Ahmed, Nizar Jaber, Hossein Fariborzi

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

3 Scopus citations

Abstract

In this paper, the design and experimental results of a resonator-based temperature sensor are presented. The sensor consists of an electrostatically-actuated clamped-clamped microbeam resonator. The device is fabricated using XMB10 industrial process and is encapsulated under low pressure. The resonance frequency and the output amplitude of the resonator are measured under different temperatures. Conventionally, coupled resonators are utilized to achieve high temperature coefficient of frequency (TCf). Here, we show a high TCf of -325 ppm/°C and a resolution of 0.023 °C using a clamped-clamped resonator. Also, the resonator consumes 6.8 pico-joules, which makes it an attractive candidate for low-energy applications.

Original language	English
Title of host publication	21st International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2021
Publisher	Institute of Electrical and Electronics Engineers Inc.
Pages	1239-1242
Number of pages	4
ISBN (Electronic)	9781665412674
DOIs	https://doi.org/10.1109/Transducers50396.2021.9495651
State	Published - 20 Jun 2021

Publication series

Name	21st International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2021

Bibliographical note

Publisher Copyright:
© 2021 IEEE.

Keywords

TCf
Temperature sensor
clamped-clamped beam
encapsulated MEMS resonators

ASJC Scopus subject areas

Electrical and Electronic Engineering
Mechanical Engineering
Control and Optimization
Instrumentation

Access to Document

10.1109/Transducers50396.2021.9495651

Cite this

Zou, X., Ahmed, S., Jaber, N., & Fariborzi, H. (2021). A Compact High-Sensitivity Temperature Sensor using an Encapsulated Clamped-Clamped Mems Beam Resonator. In 21st International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2021 (pp. 1239-1242). (21st International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2021). Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/Transducers50396.2021.9495651

Zou, Xuecui ; Ahmed, Sally ; Jaber, Nizar et al. / A Compact High-Sensitivity Temperature Sensor using an Encapsulated Clamped-Clamped Mems Beam Resonator. 21st International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2021. Institute of Electrical and Electronics Engineers Inc., 2021. pp. 1239-1242 (21st International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2021).

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abstract = "In this paper, the design and experimental results of a resonator-based temperature sensor are presented. The sensor consists of an electrostatically-actuated clamped-clamped microbeam resonator. The device is fabricated using XMB10 industrial process and is encapsulated under low pressure. The resonance frequency and the output amplitude of the resonator are measured under different temperatures. Conventionally, coupled resonators are utilized to achieve high temperature coefficient of frequency (TCf). Here, we show a high TCf of -325 ppm/°C and a resolution of 0.023 °C using a clamped-clamped resonator. Also, the resonator consumes 6.8 pico-joules, which makes it an attractive candidate for low-energy applications.",

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Zou, X, Ahmed, S, Jaber, N & Fariborzi, H 2021, A Compact High-Sensitivity Temperature Sensor using an Encapsulated Clamped-Clamped Mems Beam Resonator. in 21st International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2021. 21st International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2021, Institute of Electrical and Electronics Engineers Inc., pp. 1239-1242. https://doi.org/10.1109/Transducers50396.2021.9495651

A Compact High-Sensitivity Temperature Sensor using an Encapsulated Clamped-Clamped Mems Beam Resonator. / Zou, Xuecui; Ahmed, Sally; Jaber, Nizar et al.
21st International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2021. Institute of Electrical and Electronics Engineers Inc., 2021. p. 1239-1242 (21st International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2021).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

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N2 - In this paper, the design and experimental results of a resonator-based temperature sensor are presented. The sensor consists of an electrostatically-actuated clamped-clamped microbeam resonator. The device is fabricated using XMB10 industrial process and is encapsulated under low pressure. The resonance frequency and the output amplitude of the resonator are measured under different temperatures. Conventionally, coupled resonators are utilized to achieve high temperature coefficient of frequency (TCf). Here, we show a high TCf of -325 ppm/°C and a resolution of 0.023 °C using a clamped-clamped resonator. Also, the resonator consumes 6.8 pico-joules, which makes it an attractive candidate for low-energy applications.

AB - In this paper, the design and experimental results of a resonator-based temperature sensor are presented. The sensor consists of an electrostatically-actuated clamped-clamped microbeam resonator. The device is fabricated using XMB10 industrial process and is encapsulated under low pressure. The resonance frequency and the output amplitude of the resonator are measured under different temperatures. Conventionally, coupled resonators are utilized to achieve high temperature coefficient of frequency (TCf). Here, we show a high TCf of -325 ppm/°C and a resolution of 0.023 °C using a clamped-clamped resonator. Also, the resonator consumes 6.8 pico-joules, which makes it an attractive candidate for low-energy applications.

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Zou X, Ahmed S, Jaber N, Fariborzi H. A Compact High-Sensitivity Temperature Sensor using an Encapsulated Clamped-Clamped Mems Beam Resonator. In 21st International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2021. Institute of Electrical and Electronics Engineers Inc. 2021. p. 1239-1242. (21st International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2021). doi: 10.1109/Transducers50396.2021.9495651

A Compact High-Sensitivity Temperature Sensor using an Encapsulated Clamped-Clamped Mems Beam Resonator

Abstract

Publication series

Bibliographical note

Keywords

ASJC Scopus subject areas

Access to Document

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Cite this