| Original language | English |
|---|---|
| Patent number | US9816185 |
| State | Published - 2017 |
Cite this
- APA
- Author
- BIBTEX
- Harvard
- Standard
- RIS
- Vancouver
A CHEMICAL VAPOR DEPOSITION REACTOR WITH PREHEATING, REACTION, AND COOLING ZONES
- Muataz Atieh (Inventor)
- , Zuhair Malaibari (Inventor)
Research output: Patent