| Original language | English |
|---|---|
| Patent number | US9816185 |
| State | Published - 2017 |
A CHEMICAL VAPOR DEPOSITION REACTOR WITH PREHEATING, REACTION, AND COOLING ZONES
Muataz Atieh (Inventor), Zuhair Malaibari (Inventor)
Research output: Patent
Muataz Atieh (Inventor), Zuhair Malaibari (Inventor)
Research output: Patent
| Original language | English |
|---|---|
| Patent number | US9816185 |
| State | Published - 2017 |